Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels

Yiyuan  Zhao; Henk-Willem  Veltkamp; Thomas Victor Paul Schut; Jarno Groenesteijn; Meint J. de Boer; Remco J. Wiegerink; Joost Conrad Lötters

Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels

Yiyuan Zhao, Henk-Willem Veltkamp, Thomas Victor Paul Schut, Jarno Groenesteijn, Meint J. de Boer, Remco J. Wiegerink, Joost Conrad Lötters

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Abstract

Highly-doped in-plane Si electrodes were embedded between free-hanging microfluidic channels using Surface Channel Technology. The cross-sectional area of the electrodes can be controlled by tuning the distance between the release windows and the channels. The large cross-sectional area of the electrodes is especially beneficial as microheater, but they also enable resistive or capacitive readout in e.g. flow sensors.

Original language	English
Publication status	Published - 23 Sept 2019
Event	45th International Conference on Micro- and Nano-Engineering, MNE 2019 - Rodos Palace Hotel, Rhodes, Greece Duration: 23 Sept 2019 → 26 Sept 2019 Conference number: 45 http://mne2019.org/

Conference

Conference	45th International Conference on Micro- and Nano-Engineering, MNE 2019
Abbreviated title	MNE 2019
Country/Territory	Greece
City	Rhodes
Period	23/09/19 → 26/09/19
Internet address	http://mne2019.org/

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title = "Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels",

abstract = "Highly-doped in-plane Si electrodes were embedded between free-hanging microfluidic channels using Surface Channel Technology. The cross-sectional area of the electrodes can be controlled by tuning the distance between the release windows and the channels. The large cross-sectional area of the electrodes is especially beneficial as microheater, but they also enable resistive or capacitive readout in e.g. flow sensors.",

author = "Yiyuan Zhao and Henk-Willem Veltkamp and Schut, {Thomas Victor Paul} and Jarno Groenesteijn and {de Boer}, {Meint J.} and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",

year = "2019",

month = sep,

day = "23",

language = "English",

note = "45th International Conference on Micro- and Nano-Engineering, MNE 2019, MNE 2019 ; Conference date: 23-09-2019 Through 26-09-2019",

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TY - CONF

T1 - Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels

AU - Zhao, Yiyuan

AU - Veltkamp, Henk-Willem

AU - Schut, Thomas Victor Paul

AU - Groenesteijn, Jarno

AU - de Boer, Meint J.

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

N1 - Conference code: 45

PY - 2019/9/23

Y1 - 2019/9/23

N2 - Highly-doped in-plane Si electrodes were embedded between free-hanging microfluidic channels using Surface Channel Technology. The cross-sectional area of the electrodes can be controlled by tuning the distance between the release windows and the channels. The large cross-sectional area of the electrodes is especially beneficial as microheater, but they also enable resistive or capacitive readout in e.g. flow sensors.

AB - Highly-doped in-plane Si electrodes were embedded between free-hanging microfluidic channels using Surface Channel Technology. The cross-sectional area of the electrodes can be controlled by tuning the distance between the release windows and the channels. The large cross-sectional area of the electrodes is especially beneficial as microheater, but they also enable resistive or capacitive readout in e.g. flow sensors.

M3 - Abstract

T2 - 45th International Conference on Micro- and Nano-Engineering, MNE 2019

Y2 - 23 September 2019 through 26 September 2019

ER -

Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels

Abstract

Conference

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