Abstract
Highly-doped in-plane Si electrodes were embedded between free-hanging microfluidic channels using Surface Channel Technology. The cross-sectional area of the electrodes can be controlled by tuning the distance between the release windows and the channels. The large cross-sectional area of the electrodes is especially beneficial as microheater, but they also enable resistive or capacitive readout in e.g. flow sensors.
Original language | English |
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Publication status | Published - 23 Sept 2019 |
Event | 45th International Conference on Micro- and Nano-Engineering, MNE 2019 - Rodos Palace Hotel, Rhodes, Greece Duration: 23 Sept 2019 → 26 Sept 2019 Conference number: 45 http://mne2019.org/ |
Conference
Conference | 45th International Conference on Micro- and Nano-Engineering, MNE 2019 |
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Abbreviated title | MNE 2019 |
Country/Territory | Greece |
City | Rhodes |
Period | 23/09/19 → 26/09/19 |
Internet address |