Highly efficient blazed grating with multilayer coating for tender X-ray energies

F. Senf; Frederik Bijkerk; F. Eggenstein; G. Gwalt; Qiushi Huang; Robbert Wilhelmus Elisabeth van de Kruijs; O. Kutz; S. Lemke; Eric Louis; M. Mertin; I. Packe; I. Rudolph; F. Schafers; F. Siewert; A. Sokolov; Jacobus Marinus Sturm; C. Waberski; Z. Wang; J. Wolf; T. Zeschke; A. Erko

doi:10.1364/OE.24.013220

Highly efficient blazed grating with multilayer coating for tender X-ray energies

F. Senf, Frederik Bijkerk, F. Eggenstein, G. Gwalt, Qiushi Huang, Robbert Wilhelmus Elisabeth van de Kruijs, O. Kutz, S. Lemke, Eric Louis, M. Mertin, I. Packe, I. Rudolph, F. Schafers, F. Siewert, A. Sokolov, Jacobus Marinus Sturm, C. Waberski, Z. Wang, J. Wolf, T. ZeschkeA. Erko

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Abstract

For photon energies of 1 – 5 keV, blazed gratings with multilayer coating are ideally suited for the suppression of stray and higher orders light in grating monochromators. We developed and characterized a blazed 2000 lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the blaze angle of 0.84° in order to provide highest efficiency in the photon energy range between 1.5 keV and 3 keV. Efficiency of the multilayer grating as well as the reflectance of a witness multilayer which were coated simultaneously have been measured. An efficiency of 35% was measured at 2 keV while a maximum efficiency of 55% was achieved at 4 keV. In addition, a strong suppression of higher orders was observed which makes blazed multilayer gratings a favorable dispersing element also for the low X-ray energy range.

Original language	English
Pages (from-to)	13220-13230
Number of pages	11
Journal	Optics express
Volume	24
Issue number	12
DOIs	https://doi.org/10.1364/OE.24.013220
Publication status	Published - 2016

Keywords

IR-101932
METIS-318633

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10.1364/OE.24.013220

senf_highlyFinal published version, 3.84 MB

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Senf, F., Bijkerk, F., Eggenstein, F., Gwalt, G., Huang, Q., van de Kruijs, R. W. E., Kutz, O., Lemke, S., Louis, E., Mertin, M., Packe, I., Rudolph, I., Schafers, F., Siewert, F., Sokolov, A., Sturm, J. M., Waberski, C., Wang, Z., Wolf, J., ... Erko, A. (2016). Highly efficient blazed grating with multilayer coating for tender X-ray energies. Optics express, 24(12), 13220-13230. https://doi.org/10.1364/OE.24.013220

@article{4413336aa8d949d8aeb857409c56b38a,

title = "Highly efficient blazed grating with multilayer coating for tender X-ray energies",

abstract = "For photon energies of 1 – 5 keV, blazed gratings with multilayer coating are ideally suited for the suppression of stray and higher orders light in grating monochromators. We developed and characterized a blazed 2000 lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the blaze angle of 0.84° in order to provide highest efficiency in the photon energy range between 1.5 keV and 3 keV. Efficiency of the multilayer grating as well as the reflectance of a witness multilayer which were coated simultaneously have been measured. An efficiency of 35% was measured at 2 keV while a maximum efficiency of 55% was achieved at 4 keV. In addition, a strong suppression of higher orders was observed which makes blazed multilayer gratings a favorable dispersing element also for the low X-ray energy range.",

keywords = "IR-101932, METIS-318633",

author = "F. Senf and Frederik Bijkerk and F. Eggenstein and G. Gwalt and Qiushi Huang and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and O. Kutz and S. Lemke and Eric Louis and M. Mertin and I. Packe and I. Rudolph and F. Schafers and F. Siewert and A. Sokolov and Sturm, {Jacobus Marinus} and C. Waberski and Z. Wang and J. Wolf and T. Zeschke and A. Erko",

year = "2016",

doi = "10.1364/OE.24.013220",

language = "English",

volume = "24",

pages = "13220--13230",

journal = "Optics express",

issn = "1094-4087",

publisher = "The Optical Society",

number = "12",

}

Senf, F, Bijkerk, F, Eggenstein, F, Gwalt, G, Huang, Q, van de Kruijs, RWE, Kutz, O, Lemke, S, Louis, E, Mertin, M, Packe, I, Rudolph, I, Schafers, F, Siewert, F, Sokolov, A, Sturm, JM, Waberski, C, Wang, Z, Wolf, J, Zeschke, T & Erko, A 2016, 'Highly efficient blazed grating with multilayer coating for tender X-ray energies', Optics express, vol. 24, no. 12, pp. 13220-13230. https://doi.org/10.1364/OE.24.013220

TY - JOUR

T1 - Highly efficient blazed grating with multilayer coating for tender X-ray energies

AU - Senf, F.

AU - Bijkerk, Frederik

AU - Eggenstein, F.

AU - Gwalt, G.

AU - Huang, Qiushi

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Kutz, O.

AU - Lemke, S.

AU - Louis, Eric

AU - Mertin, M.

AU - Packe, I.

AU - Rudolph, I.

AU - Schafers, F.

AU - Siewert, F.

AU - Sokolov, A.

AU - Sturm, Jacobus Marinus

AU - Waberski, C.

AU - Wang, Z.

AU - Wolf, J.

AU - Zeschke, T.

AU - Erko, A.

PY - 2016

Y1 - 2016

N2 - For photon energies of 1 – 5 keV, blazed gratings with multilayer coating are ideally suited for the suppression of stray and higher orders light in grating monochromators. We developed and characterized a blazed 2000 lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the blaze angle of 0.84° in order to provide highest efficiency in the photon energy range between 1.5 keV and 3 keV. Efficiency of the multilayer grating as well as the reflectance of a witness multilayer which were coated simultaneously have been measured. An efficiency of 35% was measured at 2 keV while a maximum efficiency of 55% was achieved at 4 keV. In addition, a strong suppression of higher orders was observed which makes blazed multilayer gratings a favorable dispersing element also for the low X-ray energy range.

AB - For photon energies of 1 – 5 keV, blazed gratings with multilayer coating are ideally suited for the suppression of stray and higher orders light in grating monochromators. We developed and characterized a blazed 2000 lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the blaze angle of 0.84° in order to provide highest efficiency in the photon energy range between 1.5 keV and 3 keV. Efficiency of the multilayer grating as well as the reflectance of a witness multilayer which were coated simultaneously have been measured. An efficiency of 35% was measured at 2 keV while a maximum efficiency of 55% was achieved at 4 keV. In addition, a strong suppression of higher orders was observed which makes blazed multilayer gratings a favorable dispersing element also for the low X-ray energy range.

KW - IR-101932

KW - METIS-318633

U2 - 10.1364/OE.24.013220

DO - 10.1364/OE.24.013220

M3 - Article

VL - 24

SP - 13220

EP - 13230

JO - Optics express

JF - Optics express

SN - 1094-4087

IS - 12

ER -

Highly efficient blazed grating with multilayer coating for tender X-ray energies

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