Highly efficient blazed grating with multilayer coating for tender X-ray energies

F. Senf, Frederik Bijkerk, F. Eggenstein, G. Gwalt, Qiushi Huang, Robbert Wilhelmus Elisabeth van de Kruijs, O. Kutz, S. Lemke, Eric Louis, M. Mertin, I. Packe, I. Rudolph, F. Schafers, F. Siewert, A. Sokolov, Jacobus Marinus Sturm, C. Waberski, Z. Wang, J. Wolf, T. ZeschkeA. Erko

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For photon energies of 1 – 5 keV, blazed gratings with multilayer coating are ideally suited for the suppression of stray and higher orders light in grating monochromators. We developed and characterized a blazed 2000 lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the blaze angle of 0.84° in order to provide highest efficiency in the photon energy range between 1.5 keV and 3 keV. Efficiency of the multilayer grating as well as the reflectance of a witness multilayer which were coated simultaneously have been measured. An efficiency of 35% was measured at 2 keV while a maximum efficiency of 55% was achieved at 4 keV. In addition, a strong suppression of higher orders was observed which makes blazed multilayer gratings a favorable dispersing element also for the low X-ray energy range.
Original languageEnglish
Pages (from-to)13220-13230
Number of pages11
JournalOptics express
Issue number12
Publication statusPublished - 2016


  • IR-101932
  • METIS-318633


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