Abstract
For photon energies of 1 – 5 keV, blazed gratings with multilayer
coating are ideally suited for the suppression of stray and higher orders light
in grating monochromators. We developed and characterized a blazed 2000
lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer
d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the
blaze angle of 0.84° in order to provide highest efficiency in the photon
energy range between 1.5 keV and 3 keV. Efficiency of the multilayer
grating as well as the reflectance of a witness multilayer which were coated
simultaneously have been measured. An efficiency of 35% was measured at
2 keV while a maximum efficiency of 55% was achieved at 4 keV. In
addition, a strong suppression of higher orders was observed which makes
blazed multilayer gratings a favorable dispersing element also for the low
X-ray energy range.
Original language | English |
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Pages (from-to) | 13220-13230 |
Number of pages | 11 |
Journal | Optics express |
Volume | 24 |
Issue number | 12 |
DOIs | |
Publication status | Published - 2016 |
Keywords
- IR-101932
- METIS-318633