Highly sensitive biomimetic flow sensor arrays

R.K. Jaganatharaja, C.M. Bruinink, M.L. Kolster, Theodorus S.J. Lammerink, Remco J. Wiegerink, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Abstract

    In this paper, we report, to the best of our knowledge [1], the most sensitive artificial hair-based flow-sensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from crickets’ cerci, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize higher sensitivity by means of model-based design optimizations and fabricated with advanced MEMS technologies. The presented artificial hair-sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s that surpass noise levels even at 1 kHz operational bandwidths.
    Original languageUndefined
    Title of host publicationThe Sense of Contact 11
    Place of PublicationLeusden
    PublisherFHI - Federatie Van Technologiebranches
    Pages-
    Number of pages2
    ISBN (Print)978-90-74702-55-3
    Publication statusPublished - 8 Apr 2009
    Event11th Sensor Technology Conference Sense of Contact 2009 - Zeist, Netherlands
    Duration: 8 Apr 20098 Apr 2009
    Conference number: 11

    Publication series

    Name
    PublisherFHI - Federatie Van Technologiebranches

    Workshop

    Workshop11th Sensor Technology Conference Sense of Contact 2009
    Abbreviated titleSense of Contact XI
    CountryNetherlands
    CityZeist
    Period8/04/098/04/09

    Keywords

    • EWI-15343
    • IR-67471
    • METIS-263843
    • TST-Life like

    Cite this

    Jaganatharaja, R. K., Bruinink, C. M., Kolster, M. L., Lammerink, T. S. J., Wiegerink, R. J., & Krijnen, G. J. M. (2009). Highly sensitive biomimetic flow sensor arrays. In The Sense of Contact 11 (pp. -). Leusden: FHI - Federatie Van Technologiebranches.