Abstract
In this paper, we report, to the best of our knowledge [1], the most sensitive artificial hair-based flow-sensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from crickets’ cerci, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize higher sensitivity by means of model-based design optimizations and fabricated with advanced MEMS technologies. The presented artificial hair-sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s that surpass noise levels even at 1 kHz operational bandwidths.
| Original language | Undefined |
|---|---|
| Title of host publication | The Sense of Contact 11 |
| Place of Publication | Leusden |
| Publisher | FHI - Federatie Van Technologiebranches |
| Pages | - |
| Number of pages | 2 |
| ISBN (Print) | 978-90-74702-55-3 |
| Publication status | Published - 8 Apr 2009 |
| Event | 11th Sensor Technology Conference Sense of Contact 2009 - Zeist, Netherlands Duration: 8 Apr 2009 → 8 Apr 2009 Conference number: 11 |
Publication series
| Name | |
|---|---|
| Publisher | FHI - Federatie Van Technologiebranches |
Workshop
| Workshop | 11th Sensor Technology Conference Sense of Contact 2009 |
|---|---|
| Abbreviated title | Sense of Contact XI |
| Country/Territory | Netherlands |
| City | Zeist |
| Period | 8/04/09 → 8/04/09 |
Keywords
- EWI-15343
- IR-67471
- METIS-263843
- TST-Life like
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