Abstract
In this paper, we report, to the best of our knowledge, the most sensitive artificial hair-based flow-sensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from the cerci of crickets, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize comparable sensitivity to nature by means of model-based design optimizations and were fabricated using advanced MEMS technologies. The presented artificial hair sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s surpassing noise levels at 1 kHz operational bandwidths.
Original language | Undefined |
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Title of host publication | Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems |
Place of Publication | U.S.A |
Publisher | IEEE |
Pages | 1541-1544 |
Number of pages | 4 |
ISBN (Print) | 978-1-4244-4193-8 |
DOIs | |
Publication status | Published - 21 Jun 2009 |
Event | 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Sheraton Denver Hotel, Denver, United States Duration: 21 Jun 2009 → 25 Jun 2009 Conference number: 15 |
Publication series
Name | |
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Publisher | IEEE |
Conference
Conference | 15th International Conference on Solid-State Sensors, Actuators and Microsystems |
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Abbreviated title | TRANSDUCERS 2009 |
Country/Territory | United States |
City | Denver |
Period | 21/06/09 → 25/06/09 |
Keywords
- IR-67524
- METIS-263920
- Flow sensing
- TST-Life like
- Biomimetic MEMS
- EWI-15700
- MEMS Sensor Arrays
- Artificial Hair Sensors