Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows

R.K. Jaganatharaja; C.M. Bruinink; B.M. Hagedoorn; M.L. Kolster; Theodorus S.J. Lammerink; Remco J. Wiegerink; Gijsbertus J.M. Krijnen

doi:10.1109/SENSOR.2009.5285780

Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows

R.K. Jaganatharaja, C.M. Bruinink, B.M. Hagedoorn, M.L. Kolster, Theodorus S.J. Lammerink, Remco J. Wiegerink, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

8 Citations (Scopus)

96 Downloads (Pure)

Abstract

In this paper, we report, to the best of our knowledge, the most sensitive artificial hair-based flow-sensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from the cerci of crickets, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize comparable sensitivity to nature by means of model-based design optimizations and were fabricated using advanced MEMS technologies. The presented artificial hair sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s surpassing noise levels at 1 kHz operational bandwidths.

Original language	Undefined
Title of host publication	Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Place of Publication	U.S.A
Publisher	IEEE
Pages	1541-1544
Number of pages	4
ISBN (Print)	978-1-4244-4193-8
DOIs	https://doi.org/10.1109/SENSOR.2009.5285780
Publication status	Published - 21 Jun 2009
Event	15th International Conference on Solid-State Sensors, Actuators and Microsystems - Sheraton Denver Hotel, Denver, United States Duration: 21 Jun 2009 → 25 Jun 2009 Conference number: 15

Publication series

Name
Publisher	IEEE

Conference

Conference	15th International Conference on Solid-State Sensors, Actuators and Microsystems
Abbreviated title	TRANSDUCERS 2009
Country	United States
City	Denver
Period	21/06/09 → 25/06/09

Keywords

IR-67524
METIS-263920
Flow sensing
TST-Life like
Biomimetic MEMS
EWI-15700
MEMS Sensor Arrays
Artificial Hair Sensors

Access to Document

10.1109/SENSOR.2009.5285780

383_1762
open
383_1762
open

Cite this

Jaganatharaja, R. K., Bruinink, C. M., Hagedoorn, B. M., Kolster, M. L., Lammerink, T. S. J., Wiegerink, R. J., & Krijnen, G. J. M. (2009). Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows. In Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1541-1544). IEEE. https://doi.org/10.1109/SENSOR.2009.5285780

Jaganatharaja, R.K. ; Bruinink, C.M. ; Hagedoorn, B.M. ; Kolster, M.L. ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. ; Krijnen, Gijsbertus J.M. / Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows. Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems. U.S.A : IEEE, 2009. pp. 1541-1544

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title = "Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows",

abstract = "In this paper, we report, to the best of our knowledge, the most sensitive artificial hair-based flow-sensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from the cerci of crickets, one of nature{\textquoteright}s best in sensing small air flows. The presented hair sensor arrays aim to realize comparable sensitivity to nature by means of model-based design optimizations and were fabricated using advanced MEMS technologies. The presented artificial hair sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s surpassing noise levels at 1 kHz operational bandwidths.",

keywords = "IR-67524, METIS-263920, Flow sensing, TST-Life like, Biomimetic MEMS, EWI-15700, MEMS Sensor Arrays, Artificial Hair Sensors",

author = "R.K. Jaganatharaja and C.M. Bruinink and B.M. Hagedoorn and M.L. Kolster and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.}",

year = "2009",

month = jun,

day = "21",

doi = "10.1109/SENSOR.2009.5285780",

language = "Undefined",

isbn = "978-1-4244-4193-8",

publisher = "IEEE",

pages = "1541--1544",

booktitle = "Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

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note = "null ; Conference date: 21-06-2009 Through 25-06-2009",

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Jaganatharaja, RK, Bruinink, CM, Hagedoorn, BM, Kolster, ML, Lammerink, TSJ , Wiegerink, RJ & Krijnen, GJM 2009, Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows. in Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, U.S.A, pp. 1541-1544, 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, United States, 21/06/09. https://doi.org/10.1109/SENSOR.2009.5285780

Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows. / Jaganatharaja, R.K.; Bruinink, C.M.; Hagedoorn, B.M.; Kolster, M.L.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.

Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems. U.S.A : IEEE, 2009. p. 1541-1544.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Hagedoorn, B.M.

AU - Kolster, M.L.

AU - Lammerink, Theodorus S.J.

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N2 - In this paper, we report, to the best of our knowledge, the most sensitive artificial hair-based flow-sensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from the cerci of crickets, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize comparable sensitivity to nature by means of model-based design optimizations and were fabricated using advanced MEMS technologies. The presented artificial hair sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s surpassing noise levels at 1 kHz operational bandwidths.

AB - In this paper, we report, to the best of our knowledge, the most sensitive artificial hair-based flow-sensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from the cerci of crickets, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize comparable sensitivity to nature by means of model-based design optimizations and were fabricated using advanced MEMS technologies. The presented artificial hair sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s surpassing noise levels at 1 kHz operational bandwidths.

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KW - Artificial Hair Sensors

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BT - Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems

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