Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows

R.K. Jaganatharaja, C.M. Bruinink, B.M. Hagedoorn, M.L. Kolster, Theodorus S.J. Lammerink, Remco J. Wiegerink, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    8 Citations (Scopus)
    96 Downloads (Pure)

    Abstract

    In this paper, we report, to the best of our knowledge, the most sensitive artificial hair-based flow-sensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from the cerci of crickets, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize comparable sensitivity to nature by means of model-based design optimizations and were fabricated using advanced MEMS technologies. The presented artificial hair sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s surpassing noise levels at 1 kHz operational bandwidths.
    Original languageUndefined
    Title of host publicationProceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems
    Place of PublicationU.S.A
    PublisherIEEE
    Pages1541-1544
    Number of pages4
    ISBN (Print)978-1-4244-4193-8
    DOIs
    Publication statusPublished - 21 Jun 2009
    Event15th International Conference on Solid-State Sensors, Actuators and Microsystems - Sheraton Denver Hotel, Denver, United States
    Duration: 21 Jun 200925 Jun 2009
    Conference number: 15

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference15th International Conference on Solid-State Sensors, Actuators and Microsystems
    Abbreviated titleTRANSDUCERS 2009
    CountryUnited States
    CityDenver
    Period21/06/0925/06/09

    Keywords

    • IR-67524
    • METIS-263920
    • Flow sensing
    • TST-Life like
    • Biomimetic MEMS
    • EWI-15700
    • MEMS Sensor Arrays
    • Artificial Hair Sensors

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