Highly sensitive micro coriolis mass flow sensor

J. Haneveld; Theodorus S.J. Lammerink; Marcel Dijkstra; H. Droogendijk; H. Droogendijk; Meint J. de Boer; Remco J. Wiegerink

doi:10.1109/MEMSYS.2008.4443807

Highly sensitive micro coriolis mass flow sensor

J. Haneveld, Theodorus S.J. Lammerink, Marcel Dijkstra, H. Droogendijk, H. Droogendijk, Meint J. de Boer, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

28 Citations (Scopus)

415 Downloads (Pure)

Abstract

We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 ?m diameter and 1.2 μm wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor.

Original language	Undefined
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Place of Publication	Piscataway
Publisher	IEEE Computer Society
Pages	920-923
Number of pages	4
ISBN (Print)	978-1-4244-1793-3
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443807
Publication status	Published - 13 Jan 2008
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 - Tucson, United States Duration: 13 Jan 2008 → 17 Jan 2008 Conference number: 21

Publication series

Name
Publisher	IEEE Computer Society Press
Number	08332

Conference

Conference	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008
Abbreviated title	MEMS
Country/Territory	United States
City	Tucson
Period	13/01/08 → 17/01/08

Keywords

EWI-14258
IR-65154
METIS-252135

Access to Document

10.1109/MEMSYS.2008.4443807

Cite this

Haneveld, J., Lammerink, T. S. J., Dijkstra, M., Droogendijk, H., Droogendijk, H., de Boer, M. J., & Wiegerink, R. J. (2008). Highly sensitive micro coriolis mass flow sensor. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 920-923). [10.1109/MEMSYS.2008.4443807] IEEE Computer Society. https://doi.org/10.1109/MEMSYS.2008.4443807

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title = "Highly sensitive micro coriolis mass flow sensor",

abstract = "We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 ?m diameter and 1.2 μm wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor.",

keywords = "EWI-14258, IR-65154, METIS-252135",

author = "J. Haneveld and Lammerink, {Theodorus S.J.} and Marcel Dijkstra and H. Droogendijk and H. Droogendijk and {de Boer}, {Meint J.} and Wiegerink, {Remco J.}",

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year = "2008",

month = jan,

day = "13",

doi = "10.1109/MEMSYS.2008.4443807",

language = "Undefined",

isbn = "978-1-4244-1793-3",

publisher = "IEEE Computer Society",

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address = "United States",

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Haneveld, J, Lammerink, TSJ, Dijkstra, M, Droogendijk, H, Droogendijk, H, de Boer, MJ & Wiegerink, RJ 2008, Highly sensitive micro coriolis mass flow sensor. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 10.1109/MEMSYS.2008.4443807, IEEE Computer Society, Piscataway, pp. 920-923, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, Tucson, Arizona, United States, 13/01/08. https://doi.org/10.1109/MEMSYS.2008.4443807

Highly sensitive micro coriolis mass flow sensor. / Haneveld, J.; Lammerink, Theodorus S.J.; Dijkstra, Marcel; Droogendijk, H.; Droogendijk, H.; de Boer, Meint J.; Wiegerink, Remco J.

MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. Piscataway : IEEE Computer Society, 2008. p. 920-923 10.1109/MEMSYS.2008.4443807.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Wiegerink, Remco J.

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KW - IR-65154

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