Abstract
We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 ?m diameter and 1.2 μm wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor.
Original language | Undefined |
---|---|
Title of host publication | MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems |
Place of Publication | Piscataway |
Publisher | IEEE Computer Society |
Pages | 920-923 |
Number of pages | 4 |
ISBN (Print) | 978-1-4244-1793-3 |
DOIs | |
Publication status | Published - 13 Jan 2008 |
Event | 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 - Tucson, United States Duration: 13 Jan 2008 → 17 Jan 2008 Conference number: 21 |
Publication series
Name | |
---|---|
Publisher | IEEE Computer Society Press |
Number | 08332 |
Conference
Conference | 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 |
---|---|
Abbreviated title | MEMS |
Country/Territory | United States |
City | Tucson |
Period | 13/01/08 → 17/01/08 |
Keywords
- EWI-14258
- IR-65154
- METIS-252135