Highly sensitive micro coriolis mass flow sensor

J. Haneveld, Theodorus S.J. Lammerink, Marcel Dijkstra, H. Droogendijk, H. Droogendijk, Meint J. de Boer, Remco J. Wiegerink

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    27 Citations (Scopus)
    279 Downloads (Pure)

    Abstract

    We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 ?m diameter and 1.2 μm wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor.
    Original languageUndefined
    Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages920-923
    Number of pages4
    ISBN (Print)978-1-4244-1793-3
    DOIs
    Publication statusPublished - 13 Jan 2008
    Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 - Tucson, United States
    Duration: 13 Jan 200817 Jan 2008
    Conference number: 21

    Publication series

    Name
    PublisherIEEE Computer Society Press
    Number08332

    Conference

    Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008
    Abbreviated titleMEMS
    CountryUnited States
    CityTucson
    Period13/01/0817/01/08

    Keywords

    • EWI-14258
    • IR-65154
    • METIS-252135

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