Hot-Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry

Alexey Y. Kovalgin, Mengdi Yang, Sourish Banerjee, Ramazan Oguzhan Apaydin, Antonius A.I. Aarnink, Sachin Kinge, Robertus A.M. Wolters

    Research output: Contribution to journalArticleAcademicpeer-review

    19 Citations (Scopus)
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    Engineering & Materials Science