Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Mengdi Yang, Antonius A.I. Aarnink, Alexeij Y. Kovalgin, Robertus A.M. Wolters, Jurriaan Schmitz

    Research output: Contribution to journal › Article › Academic › peer-review

    13 Citations (Scopus)

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