Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Mengdi Yang*, Antonius A.I. Aarnink, Alexey Y. Kovalgin, Rob A.M. Wolters, Jurriaan Schmitz

*Corresponding author for this work

    Research output: Contribution to journal › Article › Academic › peer-review

    13 Citations (Scopus)
    48 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes'. Together they form a unique fingerprint.

    Material Science