Hot-Wire generated atomic hydrogen and its impact on thermal ALD in TiCl4/NH3 System

    Research output: Contribution to journalArticleAcademicpeer-review

    12 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Hot-Wire generated atomic hydrogen and its impact on thermal ALD in TiCl<sub>4</sub>/NH<sub>3</sub> System'. Together they form a unique fingerprint.