H control of piezo actuated tilting mirror mechanism

J. Van Dijk*

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


    In here the high bandwidth (2000 Hz.) feedback control of a precision mechanisms driven by a piezo actuator demanding a high absolute accuracy is discussed. The mechanism considered is rotating a mirror for laser bundle manipulation. It will be shown that a loopshaping controller design using the mixed sensitivity approach provides robust performance in the non co-located control case.

    Original languageEnglish
    Title of host publicationEuropean Control Conference, ECC 1999 - Conference Proceedings
    Number of pages6
    ISBN (Electronic)9783952417355
    Publication statusPublished - 24 Mar 2015
    Event1999 European Control Conference, ECC 1999 - Karlsruhe, Germany
    Duration: 31 Aug 19993 Sep 1999


    Conference1999 European Control Conference, ECC 1999
    Abbreviated titleECC

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