H control of piezo actuated tilting mirror mechanism

J. Van Dijk*

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    In here the high bandwidth (2000 Hz.) feedback control of a precision mechanisms driven by a piezo actuator demanding a high absolute accuracy is discussed. The mechanism considered is rotating a mirror for laser bundle manipulation. It will be shown that a loopshaping controller design using the mixed sensitivity approach provides robust performance in the non co-located control case.

    Original languageEnglish
    Title of host publicationEuropean Control Conference, ECC 1999 - Conference Proceedings
    PublisherIEEE
    Pages2210-2215
    Number of pages6
    ISBN (Electronic)9783952417355
    Publication statusPublished - 24 Mar 2015
    Event1999 European Control Conference, ECC 1999 - Karlsruhe, Germany
    Duration: 31 Aug 19993 Sep 1999

    Conference

    Conference1999 European Control Conference, ECC 1999
    Abbreviated titleECC
    CountryGermany
    CityKarlsruhe
    Period31/08/993/09/99

    Fingerprint Dive into the research topics of 'H<sub>∞</sub> control of piezo actuated tilting mirror mechanism'. Together they form a unique fingerprint.

    Cite this