H∞ control of piezo actuated tilting mirror mechanism

J. Van Dijk

H_∞ control of piezo actuated tilting mirror mechanism

J. Van Dijk^*

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

In here the high bandwidth (2000 Hz.) feedback control of a precision mechanisms driven by a piezo actuator demanding a high absolute accuracy is discussed. The mechanism considered is rotating a mirror for laser bundle manipulation. It will be shown that a loopshaping controller design using the mixed sensitivity approach provides robust performance in the non co-located control case.

Original language	English
Title of host publication	European Control Conference, ECC 1999 - Conference Proceedings
Publisher	IEEE
Pages	2210-2215
Number of pages	6
ISBN (Electronic)	9783952417355
Publication status	Published - 24 Mar 2015
Event	1999 European Control Conference, ECC 1999 - Karlsruhe, Germany Duration: 31 Aug 1999 → 3 Sept 1999

Conference

Conference	1999 European Control Conference, ECC 1999
Abbreviated title	ECC
Country/Territory	Germany
City	Karlsruhe
Period	31/08/99 → 3/09/99

Cite this

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title = "H∞ control of piezo actuated tilting mirror mechanism",

abstract = "In here the high bandwidth (2000 Hz.) feedback control of a precision mechanisms driven by a piezo actuator demanding a high absolute accuracy is discussed. The mechanism considered is rotating a mirror for laser bundle manipulation. It will be shown that a loopshaping controller design using the mixed sensitivity approach provides robust performance in the non co-located control case.",

author = "\{Van Dijk\}, J.",

year = "2015",

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day = "24",

language = "English",

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AB - In here the high bandwidth (2000 Hz.) feedback control of a precision mechanisms driven by a piezo actuator demanding a high absolute accuracy is discussed. The mechanism considered is rotating a mirror for laser bundle manipulation. It will be shown that a loopshaping controller design using the mixed sensitivity approach provides robust performance in the non co-located control case.

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M3 - Conference contribution

AN - SCOPUS:84930606834

SP - 2210

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BT - European Control Conference, ECC 1999 - Conference Proceedings

PB - IEEE

T2 - 1999 European Control Conference, ECC 1999

Y2 - 31 August 1999 through 3 September 1999

ER -

H_∞ control of piezo actuated tilting mirror mechanism

Abstract

Conference

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