Humidity and polarity influence on MIM PZT capacitor degradation and breakdown

Jiahui Wang; Cora  Salm; Evert Houwman; Jurriaan  Schmitz; Minh Nguyen

doi:10.1109/IIRW.2016.7904903

Humidity and polarity influence on MIM PZT capacitor degradation and breakdown

Jiahui Wang, Cora Salm, Evert Houwman, Jurriaan Schmitz, Minh Nguyen

Inorganic Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

5 Citations (Scopus)

327 Downloads (Pure)

Abstract

This paper presents a reliability study on unpackaged metal-PZT-metal capacitors. Both ramped voltage stress (RVS) and time dependent dielectric breakdown (TDDB) measurements show that environmental humidity dramatically worsens the PZT reliability. Visible breakdown spots on the surface of PZT capacitors are studied in detail. The measurement results indicate that both reversible and irreversible PZT degradation/breakdown happen during TDDB. The dependence of time to breakdown on polarity of applied voltage is argued to relate to the crystal structure of PZT and the stack of the PZT capacitor.

Original language	English
Title of host publication	2016 IEEE International Integrated Reliability Workshop (IIRW)
Publisher	IEEE
Pages	65-68
Number of pages	4
ISBN (Electronic)	978-1-5090-4193-0
ISBN (Print)	978-1-5090-4192-3
DOIs	https://doi.org/10.1109/IIRW.2016.7904903
Publication status	Published - 9 Oct 2016
Event	2016 International Integrated Reliability Workshop, IIRW 2016 - Stanford Sierra Conference Center, Fallen Leaf Lake, United States Duration: 9 Oct 2016 → 13 Oct 2016 http://www.iirw.org/past-events/iirw-2016/home.html

Workshop

Workshop	2016 International Integrated Reliability Workshop, IIRW 2016
Abbreviated title	IIRW
Country/Territory	United States
City	Fallen Leaf Lake
Period	9/10/16 → 13/10/16
Internet address	http://www.iirw.org/past-events/iirw-2016/home.html

Keywords

EWI-27760
Grain boundary
Grain size
MEMS
PZT
oxygen ion
Degradation
TDDB
defects
METIS-321730
IR-103643
Breakdown
oxygen vacancy

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@inproceedings{5a7196fd340349b7aeabb80d94c6a3f5,

title = "Humidity and polarity influence on MIM PZT capacitor degradation and breakdown",

abstract = "This paper presents a reliability study on unpackaged metal-PZT-metal capacitors. Both ramped voltage stress (RVS) and time dependent dielectric breakdown (TDDB) measurements show that environmental humidity dramatically worsens the PZT reliability. Visible breakdown spots on the surface of PZT capacitors are studied in detail. The measurement results indicate that both reversible and irreversible PZT degradation/breakdown happen during TDDB. The dependence of time to breakdown on polarity of applied voltage is argued to relate to the crystal structure of PZT and the stack of the PZT capacitor.",

keywords = "EWI-27760, Grain boundary, Grain size, MEMS, PZT, oxygen ion, Degradation, TDDB, defects, METIS-321730, IR-103643, Breakdown, oxygen vacancy",

author = "Jiahui Wang and Cora Salm and Evert Houwman and Jurriaan Schmitz and Minh Nguyen",

year = "2016",

month = oct,

day = "9",

doi = "10.1109/IIRW.2016.7904903",

language = "English",

isbn = "978-1-5090-4192-3",

pages = "65--68",

booktitle = "2016 IEEE International Integrated Reliability Workshop (IIRW)",

publisher = "IEEE",

address = "United States",

note = "2016 International Integrated Reliability Workshop, IIRW 2016, IIRW ; Conference date: 09-10-2016 Through 13-10-2016",

url = "http://www.iirw.org/past-events/iirw-2016/home.html",

}

Wang, J, Salm, C , Houwman, E , Schmitz, J & Nguyen, M 2016, Humidity and polarity influence on MIM PZT capacitor degradation and breakdown. in 2016 IEEE International Integrated Reliability Workshop (IIRW). IEEE, pp. 65-68, 2016 International Integrated Reliability Workshop, IIRW 2016, Fallen Leaf Lake, California, United States, 9/10/16. https://doi.org/10.1109/IIRW.2016.7904903

TY - GEN

T1 - Humidity and polarity influence on MIM PZT capacitor degradation and breakdown

AU - Wang, Jiahui

AU - Salm, Cora

AU - Houwman, Evert

AU - Schmitz, Jurriaan

AU - Nguyen, Minh

PY - 2016/10/9

Y1 - 2016/10/9

N2 - This paper presents a reliability study on unpackaged metal-PZT-metal capacitors. Both ramped voltage stress (RVS) and time dependent dielectric breakdown (TDDB) measurements show that environmental humidity dramatically worsens the PZT reliability. Visible breakdown spots on the surface of PZT capacitors are studied in detail. The measurement results indicate that both reversible and irreversible PZT degradation/breakdown happen during TDDB. The dependence of time to breakdown on polarity of applied voltage is argued to relate to the crystal structure of PZT and the stack of the PZT capacitor.

AB - This paper presents a reliability study on unpackaged metal-PZT-metal capacitors. Both ramped voltage stress (RVS) and time dependent dielectric breakdown (TDDB) measurements show that environmental humidity dramatically worsens the PZT reliability. Visible breakdown spots on the surface of PZT capacitors are studied in detail. The measurement results indicate that both reversible and irreversible PZT degradation/breakdown happen during TDDB. The dependence of time to breakdown on polarity of applied voltage is argued to relate to the crystal structure of PZT and the stack of the PZT capacitor.

KW - EWI-27760

KW - Grain boundary

KW - Grain size

KW - MEMS

KW - PZT

KW - oxygen ion

KW - Degradation

KW - TDDB

KW - defects

KW - METIS-321730

KW - IR-103643

KW - Breakdown

KW - oxygen vacancy

U2 - 10.1109/IIRW.2016.7904903

DO - 10.1109/IIRW.2016.7904903

M3 - Conference contribution

SN - 978-1-5090-4192-3

SP - 65

EP - 68

BT - 2016 IEEE International Integrated Reliability Workshop (IIRW)

PB - IEEE

T2 - 2016 International Integrated Reliability Workshop, IIRW 2016

Y2 - 9 October 2016 through 13 October 2016

ER -

Humidity and polarity influence on MIM PZT capacitor degradation and breakdown

Abstract

Workshop

Keywords

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