Humidity and polarity influence on MIM PZT capacitor degradation and breakdown

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Abstract

This paper presents a reliability study on unpackaged metal-PZT-metal capacitors. Both ramped voltage stress (RVS) and time dependent dielectric breakdown (TDDB) measurements show that environmental humidity dramatically worsens the PZT reliability. Visible breakdown spots on the surface of PZT capacitors are studied in detail. The measurement results indicate that both reversible and irreversible PZT degradation/breakdown happen during TDDB. The dependence of time to breakdown on polarity of applied voltage is argued to relate to the crystal structure of PZT and the stack of the PZT capacitor.
Original languageEnglish
Title of host publication2016 IEEE International Integrated Reliability Workshop (IIRW)
PublisherIEEE
Pages65-68
Number of pages4
ISBN (Electronic)978-1-5090-4193-0
ISBN (Print)978-1-5090-4192-3
DOIs
Publication statusPublished - 9 Oct 2016
Event2016 International Integrated Reliability Workshop, IIRW 2016 - Stanford Sierra Conference Center, Fallen Leaf Lake, United States
Duration: 9 Oct 201613 Oct 2016
http://www.iirw.org/past-events/iirw-2016/home.html

Workshop

Workshop2016 International Integrated Reliability Workshop, IIRW 2016
Abbreviated titleIIRW
CountryUnited States
CityFallen Leaf Lake
Period9/10/1613/10/16
Internet address

Keywords

  • EWI-27760
  • Grain boundary
  • Grain size
  • MEMS
  • PZT
  • oxygen ion
  • Degradation
  • TDDB
  • defects
  • METIS-321730
  • IR-103643
  • Breakdown
  • oxygen vacancy

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