Hybrid Integrated Semiconductor Lasers with Silicon Nitride Feedback Circuits

Klaus-J. Boller; Albert  van Rees; Youwen Fan; Jesse Mak; Rob E. M. Lammerink; Cornelis A. A. Franken; Peter J. M. van der Slot; David A. I. Marpaung; Carsten Fallnich; Jörn P. Epping; Ruud M. Oldenbeuving; Dimitri Geskus; Ronald Dekker; Ilka Visscher; Robert Grootjans; Chris G.H. Roeloffzen; Marcel Hoekman; Edwin J. Klein; Arne Leinse; René G. Heideman

doi:10.3390/photonics7010004

Hybrid Integrated Semiconductor Lasers with Silicon Nitride Feedback Circuits

Klaus-J. Boller^*
, Albert van Rees
, Youwen Fan
, Jesse Mak
, Rob E. M. Lammerink
, Cornelis A. A. Franken
, Peter J. M. van der Slot
, David A. I. Marpaung
, Carsten Fallnich
, Jörn P. Epping
, Ruud M. Oldenbeuving
, Dimitri Geskus
, Ronald Dekker
, Ilka Visscher
, Robert Grootjans
, Chris G.H. Roeloffzen
, Marcel Hoekman
, Edwin J. Klein
, Arne Leinse
, René G. Heideman

^*Corresponding author for this work

Research output: Contribution to journal › Review article › Academic › peer-review

128 Citations (Scopus)

698 Downloads (Pure)

Abstract

Hybrid integrated semiconductor laser sources offering extremely narrow spectral linewidth, as well as compatibility for embedding into integrated photonic circuits, are of high importance for a wide range of applications. We present an overview on our recently developed hybrid-integrated diode lasers with feedback from low-loss silicon nitride (Si3N4 in SiO2) circuits, to provide sub-100-Hz-level intrinsic linewidths, up to 120 nm spectral coverage around a 1.55 μm wavelength, and an output power above 100 mW. We show dual-wavelength operation, dual-gain operation, laser frequency comb generation, and present work towards realizing a visible-light hybrid integrated diode laser.

Original language	English
Article number	4
Number of pages	34
Journal	Photonics
Volume	7
Issue number	1
DOIs	https://doi.org/10.3390/photonics7010004
Publication status	Published - 2020

Keywords

Dual-wavelength laser
Hybrid integration
InP semiconductor optical amplifier
Integrated photonic circuits
Laser frequency comb
Narrow intrinsic linewidth
Semiconductor laser
Low-loss Si3N4 waveguides

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10.3390/photonics7010004Licence: CC BY

ArticleFinal published version, 11.5 MBLicence: CC BY

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Boller, K.-J., van Rees, A., Fan, Y., Mak, J., Lammerink, R. E. M., Franken, C. A. A., van der Slot, P. J. M., Marpaung, D. A. I., Fallnich, C., Epping, J. P., Oldenbeuving, R. M., Geskus, D., Dekker, R., Visscher, I., Grootjans, R., Roeloffzen, C. G. H., Hoekman, M., Klein, E. J., Leinse, A., & Heideman, R. G. (2020). Hybrid Integrated Semiconductor Lasers with Silicon Nitride Feedback Circuits. Photonics, 7(1), Article 4. https://doi.org/10.3390/photonics7010004

@article{2e9b1aad936d4fafab9142fdfc4428bb,

title = "Hybrid Integrated Semiconductor Lasers with Silicon Nitride Feedback Circuits",

abstract = "Hybrid integrated semiconductor laser sources offering extremely narrow spectral linewidth, as well as compatibility for embedding into integrated photonic circuits, are of high importance for a wide range of applications. We present an overview on our recently developed hybrid-integrated diode lasers with feedback from low-loss silicon nitride (Si3N4 in SiO2) circuits, to provide sub-100-Hz-level intrinsic linewidths, up to 120 nm spectral coverage around a 1.55 μm wavelength, and an output power above 100 mW. We show dual-wavelength operation, dual-gain operation, laser frequency comb generation, and present work towards realizing a visible-light hybrid integrated diode laser.",

keywords = "Dual-wavelength laser, Hybrid integration, InP semiconductor optical amplifier, Integrated photonic circuits, Laser frequency comb, Narrow intrinsic linewidth, Semiconductor laser, Low-loss Si3N4 waveguides",

author = "Klaus-J. Boller and \{van Rees\}, Albert and Youwen Fan and Jesse Mak and Lammerink, \{Rob E. M.\} and Franken, \{Cornelis A. A.\} and \{van der Slot\}, \{Peter J. M.\} and Marpaung, \{David A. I.\} and Carsten Fallnich and Epping, \{J{\"o}rn P.\} and Oldenbeuving, \{Ruud M.\} and Dimitri Geskus and Ronald Dekker and Ilka Visscher and Robert Grootjans and Roeloffzen, \{Chris G.H.\} and Marcel Hoekman and Klein, \{Edwin J.\} and Arne Leinse and Heideman, \{Ren{\'e} G.\}",

year = "2020",

doi = "10.3390/photonics7010004",

language = "English",

volume = "7",

journal = "Photonics",

issn = "2304-6732",

publisher = "MDPI",

number = "1",

}

Boller, K-J, van Rees, A, Fan, Y, Mak, J, Lammerink, REM, Franken, CAA, van der Slot, PJM , Marpaung, DAI, Fallnich, C, Epping, JP, Oldenbeuving, RM, Geskus, D, Dekker, R, Visscher, I, Grootjans, R, Roeloffzen, CGH, Hoekman, M, Klein, EJ, Leinse, A & Heideman, RG 2020, 'Hybrid Integrated Semiconductor Lasers with Silicon Nitride Feedback Circuits', Photonics, vol. 7, no. 1, 4. https://doi.org/10.3390/photonics7010004

TY - JOUR

T1 - Hybrid Integrated Semiconductor Lasers with Silicon Nitride Feedback Circuits

AU - Boller, Klaus-J.

AU - van Rees, Albert

AU - Fan, Youwen

AU - Mak, Jesse

AU - Lammerink, Rob E. M.

AU - Franken, Cornelis A. A.

AU - van der Slot, Peter J. M.

AU - Marpaung, David A. I.

AU - Fallnich, Carsten

AU - Epping, Jörn P.

AU - Oldenbeuving, Ruud M.

AU - Geskus, Dimitri

AU - Dekker, Ronald

AU - Visscher, Ilka

AU - Grootjans, Robert

AU - Roeloffzen, Chris G.H.

AU - Hoekman, Marcel

AU - Klein, Edwin J.

AU - Leinse, Arne

AU - Heideman, René G.

PY - 2020

Y1 - 2020

N2 - Hybrid integrated semiconductor laser sources offering extremely narrow spectral linewidth, as well as compatibility for embedding into integrated photonic circuits, are of high importance for a wide range of applications. We present an overview on our recently developed hybrid-integrated diode lasers with feedback from low-loss silicon nitride (Si3N4 in SiO2) circuits, to provide sub-100-Hz-level intrinsic linewidths, up to 120 nm spectral coverage around a 1.55 μm wavelength, and an output power above 100 mW. We show dual-wavelength operation, dual-gain operation, laser frequency comb generation, and present work towards realizing a visible-light hybrid integrated diode laser.

AB - Hybrid integrated semiconductor laser sources offering extremely narrow spectral linewidth, as well as compatibility for embedding into integrated photonic circuits, are of high importance for a wide range of applications. We present an overview on our recently developed hybrid-integrated diode lasers with feedback from low-loss silicon nitride (Si3N4 in SiO2) circuits, to provide sub-100-Hz-level intrinsic linewidths, up to 120 nm spectral coverage around a 1.55 μm wavelength, and an output power above 100 mW. We show dual-wavelength operation, dual-gain operation, laser frequency comb generation, and present work towards realizing a visible-light hybrid integrated diode laser.

KW - Dual-wavelength laser

KW - Hybrid integration

KW - InP semiconductor optical amplifier

KW - Integrated photonic circuits

KW - Laser frequency comb

KW - Narrow intrinsic linewidth

KW - Semiconductor laser

KW - Low-loss Si3N4 waveguides

UR - https://www.scopus.com/pages/publications/85081888534

U2 - 10.3390/photonics7010004

DO - 10.3390/photonics7010004

M3 - Review article

SN - 2304-6732

VL - 7

JO - Photonics

JF - Photonics

IS - 1

M1 - 4

ER -

Hybrid Integrated Semiconductor Lasers with Silicon Nitride Feedback Circuits

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Keywords

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