Hybrid integrated silicon nitride lasers

Jörn P. Epping, Arne Leinse, Ruud M. Oldenbeuving, Ilka Visscher, Douwe Geuzebroek, Dimitri Geskus, Albert van Rees, Klaus J. Boller, Michael Theurer, Martin Möhrle, Martin Schell, Chris G. H. Roeloffzen, René G. Heideman

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

9 Citations (Scopus)
270 Downloads (Pure)


Ultra-narrow linewidth tunable hybrid integrated lasers are built from a combination of indium phosphide (InP) and silicon nitride-based TriPleX™. By combining the active functionality of InP with the ultra-low loss properties of the TriPleX™ platform narrow linewidth lasers in the C-band are realized. The InP platform is used for light generation and the TriPleX™ platform is used to define a long cavity with a wavelength-selective tunable filter. The TriPleX™ platform has the ability to adapt mode profiles over the chip and is extremely suitable for mode matching to the other platforms for hybrid integration. The tunable filter is based on a Vernier of micro-ring resonators to allow for single-mode operation, tunable by thermo-optic or stress-induced tuning. This work will show the operational principle and benefits of the hybrid lasers and the state of the art developments in the realization of these lasers. High optical powers ( <100 mW) are combined with narrow linewidth (< 1 kHz) spectral responses with tunability over a large (>100 nm) wavelength range and a low relative intensity (< -160 dB/Hz).
Original languageEnglish
Title of host publicationPhysics and Simulation of Optoelectronic Devices XXVIII
EditorsBernd Witzigmann, Marek Osiński, Yasuhiko Arakawa
ISBN (Electronic)9781510633117
Publication statusPublished - 2 Mar 2020
EventSPIE Photonics West 2020 - George R. Moscone Convention Center, San Francisco, United States
Duration: 1 Feb 20206 Feb 2020

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceSPIE Photonics West 2020
Country/TerritoryUnited States
CitySan Francisco
Internet address


  • TriPleX™
  • Hybrid integration
  • external cavity laser
  • Indium Phosphide
  • Vernier filters
  • Photonic Integrated Circuits


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