Hybrid Thermal and Mechanical 2D Anemometer Using Strain-Induced Out-of Plane Cantilevers

Victor Winnen; Thomas Leigh Hackett; Jarno Groenesteijn; Dennis Alveringh

doi:10.1109/SENSORS59705.2025.11330820

Hybrid Thermal and Mechanical 2D Anemometer Using Strain-Induced Out-of Plane Cantilevers

Victor Winnen^*
, Thomas Leigh Hackett^*
, Jarno Groenesteijn
, Dennis Alveringh

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Downloads (Pure)

Abstract

An anemometer has been realized which combines thermal and mechanical measuring principles. It consists of four cantilevers that have bent out-of-plane after fabrication due to strain mismatched silicon-rich silicon nitride layers. Platinum wires on top of the cantilevers act both as Joule heating resistor and as strain gauges. The thermal hot-film and drag force sensing techniques are complementary: the thermal sensing element allows for accurate low-flow measurements down to 0.2 m s−1 while the mechanical sensing element allows for the measurement of higher flow rates up to 8.5 m s−1 while maintaining high
accuracy as a result of its linear response. Due to different orientations, the angle of attack of the flow is detected along the out-of-plan axis, allowing for wind direction determination.

Original language	English
Title of host publication	IEEE Sensors 2025
Publisher	IEEE
Number of pages	3
ISBN (Electronic)	979-8-3315-4467-6
ISBN (Print)	979-8-3315-4468-3
DOIs	https://doi.org/10.1109/SENSORS59705.2025.11330820
Publication status	Published - 19 Jan 2026
Event	IEEE Sensors 2025 - Vancouver, Canada Duration: 19 Oct 2025 → 22 Oct 2025 https://ieee-sensors.org/conferences/ieee-sensors-2025/

Conference

Conference	IEEE Sensors 2025
Country/Territory	Canada
City	Vancouver
Period	19/10/25 → 22/10/25
Internet address	https://ieee-sensors.org/conferences/ieee-sensors-2025/

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

2026 OA procedure
Flow sensor
Hot-film
Anemometer
Microfabrication
Multi-parameter
Drag Force
Cantilever

Access to Document

10.1109/SENSORS59705.2025.11330820

ArticleFinal published version, 0.98 MBLicence: Taverne

Cite this

@inproceedings{5f3f2e9f929c4e3785f87288f4b9fd2c,

title = "Hybrid Thermal and Mechanical 2D Anemometer Using Strain-Induced Out-of Plane Cantilevers",

abstract = "An anemometer has been realized which combines thermal and mechanical measuring principles. It consists of four cantilevers that have bent out-of-plane after fabrication due to strain mismatched silicon-rich silicon nitride layers. Platinum wires on top of the cantilevers act both as Joule heating resistor and as strain gauges. The thermal hot-film and drag force sensing techniques are complementary: the thermal sensing element allows for accurate low-flow measurements down to 0.2 m s−1 while the mechanical sensing element allows for the measurement of higher flow rates up to 8.5 m s−1 while maintaining high accuracy as a result of its linear response. Due to different orientations, the angle of attack of the flow is detected along the out-of-plan axis, allowing for wind direction determination.",

keywords = "2026 OA procedure, Flow sensor, Hot-film, Anemometer, Microfabrication, Multi-parameter, Drag Force, Cantilever",

author = "Victor Winnen and Hackett, \{Thomas Leigh\} and Jarno Groenesteijn and Dennis Alveringh",

year = "2026",

month = jan,

day = "19",

doi = "10.1109/SENSORS59705.2025.11330820",

language = "English",

isbn = "979-8-3315-4468-3",

booktitle = "IEEE Sensors 2025",

publisher = "IEEE",

address = "United States",

note = "IEEE Sensors 2025 ; Conference date: 19-10-2025 Through 22-10-2025",

url = "https://ieee-sensors.org/conferences/ieee-sensors-2025/",

}

TY - GEN

T1 - Hybrid Thermal and Mechanical 2D Anemometer Using Strain-Induced Out-of Plane Cantilevers

AU - Winnen, Victor

AU - Hackett, Thomas Leigh

AU - Groenesteijn, Jarno

AU - Alveringh, Dennis

PY - 2026/1/19

Y1 - 2026/1/19

N2 - An anemometer has been realized which combines thermal and mechanical measuring principles. It consists of four cantilevers that have bent out-of-plane after fabrication due to strain mismatched silicon-rich silicon nitride layers. Platinum wires on top of the cantilevers act both as Joule heating resistor and as strain gauges. The thermal hot-film and drag force sensing techniques are complementary: the thermal sensing element allows for accurate low-flow measurements down to 0.2 m s−1 while the mechanical sensing element allows for the measurement of higher flow rates up to 8.5 m s−1 while maintaining high accuracy as a result of its linear response. Due to different orientations, the angle of attack of the flow is detected along the out-of-plan axis, allowing for wind direction determination.

AB - An anemometer has been realized which combines thermal and mechanical measuring principles. It consists of four cantilevers that have bent out-of-plane after fabrication due to strain mismatched silicon-rich silicon nitride layers. Platinum wires on top of the cantilevers act both as Joule heating resistor and as strain gauges. The thermal hot-film and drag force sensing techniques are complementary: the thermal sensing element allows for accurate low-flow measurements down to 0.2 m s−1 while the mechanical sensing element allows for the measurement of higher flow rates up to 8.5 m s−1 while maintaining high accuracy as a result of its linear response. Due to different orientations, the angle of attack of the flow is detected along the out-of-plan axis, allowing for wind direction determination.

KW - 2026 OA procedure

KW - Flow sensor

KW - Hot-film

KW - Anemometer

KW - Microfabrication

KW - Multi-parameter

KW - Drag Force

KW - Cantilever

UR - https://2025.ieee-sensorsconference.org/

U2 - 10.1109/SENSORS59705.2025.11330820

DO - 10.1109/SENSORS59705.2025.11330820

M3 - Conference contribution

SN - 979-8-3315-4468-3

BT - IEEE Sensors 2025

PB - IEEE

T2 - IEEE Sensors 2025

Y2 - 19 October 2025 through 22 October 2025

ER -

Hybrid Thermal and Mechanical 2D Anemometer Using Strain-Induced Out-of Plane Cantilevers

Abstract

Conference

UN SDGs

Keywords

Access to Document

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Cite this