Hydrogen diffusion out of ruthenium - an ab initio study of the role of adsorbates

Chidozie Onwudinanti, Geert Brocks, Vianney Koelman, Thomas Morgan, Shuxia Tao*

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)
51 Downloads (Pure)


Hydrogen permeation into mirrors used in extreme ultraviolet lithography results in the formation of blisters, which are detrimental to reflectivity. An understanding of the mechanism via which hydrogen ends up at the interface between the top ruthenium layer and the underlying bilayers is necessary to mitigate the blistering damage. In this study, we use density functional theory to examine the ways in which hydrogen, having entered the near-surface interstitial voids, can migrate further into the metal or to its surface. We show that with hydrogen and tin adsorbed on the ruthenium surface, diffusion to the surface is blocked for interstitial hydrogen in the metal, making diffusion further into the metal more likely than out-diffusion. The dependence on surface conditions matches and confirms similar findings on hydrogen permeation into metals. This suggests control and modification of surface conditions as a way to influence hydrogen retention and blistering.

Original languageEnglish
Pages (from-to)7935-7941
Number of pages7
JournalPhysical chemistry chemical physics
Issue number15
Publication statusPublished - 21 Apr 2020


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