Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

R.A.J.M. van den Bos, Christopher James Lee, Frederik Bijkerk

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 10 Mar 2015
Event	27th NNV-Symposium Plasma Physics & Radiation Technology 2015 - CongresHotel De Werelt, Lunteren, Netherlands Duration: 10 Mar 2015 → 11 Mar 2015 Conference number: 27

Conference	27th NNV-Symposium Plasma Physics & Radiation Technology 2015
Country	Netherlands
City	Lunteren
Period	10/03/15 → 11/03/15

Keywords

@conference{f8b62716c19b4cfaa14df35fe2cb062c,

title = "Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces",

keywords = "METIS-311989",

author = "{van den Bos}, R.A.J.M. and Lee, {Christopher James} and Frederik Bijkerk",

year = "2015",

month = mar,

day = "10",

language = "English",

pages = "--",

note = "27th NNV-Symposium Plasma Physics & Radiation Technology 2015 ; Conference date: 10-03-2015 Through 11-03-2015",

}

TY - CONF

T1 - Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

AU - van den Bos, R.A.J.M.

AU - Lee, Christopher James

AU - Bijkerk, Frederik

N1 - Conference code: 27

PY - 2015/3/10

Y1 - 2015/3/10

KW - METIS-311989

M3 - Poster

SP - -

T2 - 27th NNV-Symposium Plasma Physics & Radiation Technology 2015

Y2 - 10 March 2015 through 11 March 2015

ER -