Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

R.A.J.M. van den Bos, Christopher James Lee, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 10 Mar 2015
Event27th NNV-Symposium Plasma Physics & Radiation Technology 2015 - CongresHotel De Werelt, Lunteren, Netherlands
Duration: 10 Mar 201511 Mar 2015
Conference number: 27

Conference

Conference27th NNV-Symposium Plasma Physics & Radiation Technology 2015
CountryNetherlands
CityLunteren
Period10/03/1511/03/15

Keywords

  • METIS-311989

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