Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

R.A.J.M. van den Bos, Christopher James Lee, Frederik Bijkerk

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 20 Jan 2015
Event	Physics@FOM Veldhoven 2015 - NH Koningshof Veldhoven, Veldhoven, Netherlands Duration: 20 Jan 2015 → 21 Jan 2015

Keywords

@conference{c27317c367c547e4998e7f0c30eb48da,

title = "Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces",

keywords = "METIS-311990",

author = "\{van den Bos\}, R.A.J.M. and Lee, \{Christopher James\} and Frederik Bijkerk",

year = "2015",

month = jan,

day = "20",

language = "English",

pages = "--",

note = "Physics@FOM Veldhoven 2015 ; Conference date: 20-01-2015 Through 21-01-2015",

}