Hydrogen interaction with EUVL-relevant optical materials

Alexey Kuznetsov; Robbert Wilhelmus Elisabeth van de Kruijs; M.A. Gleeson; K. Schmid; Frederik Bijkerk

doi:10.1134/S1027451010040026

Hydrogen interaction with EUVL-relevant optical materials

Alexey Kuznetsov, Robbert Wilhelmus Elisabeth van de Kruijs, M.A. Gleeson, K. Schmid, Frederik Bijkerk

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Abstract

Mo/Si multilayer mirrors were exposed to deuterium ions with well-defined energies in order to gain insight into the effects of Extreme UV light driven plasma generation on reflective elements in commercial lithography equipment. Post-irradiation analysis by Rutherford Backscattering Spectrometry showed erosion of both Mo and Si layers for the highest energy 50 eV/D and exposure time 5.4 × 104 s. Nuclear Reaction Analysis revealed detectable deuterium retention for energies ⩾25 eV/D. Surface analysis by X-ray Photoelectron Spectroscopy showed erosion of the first Si layer for energies ⩾5 eV/D. Inferences on the spatial distribution of trapped deuterium are made on the basis of available data regarding deuterium retention in the materials in question

Original language	English
Pages (from-to)	563-566
Number of pages	4
Journal	Journal of surface investigation. X-ray, synchrotron and neutron techniques
Volume	4
Issue number	4
DOIs	https://doi.org/10.1134/S1027451010040026
Publication status	Published - 2010

Keywords

METIS-270304
IR-75238

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10.1134/S1027451010040026

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title = "Hydrogen interaction with EUVL-relevant optical materials",

abstract = "Mo/Si multilayer mirrors were exposed to deuterium ions with well-defined energies in order to gain insight into the effects of Extreme UV light driven plasma generation on reflective elements in commercial lithography equipment. Post-irradiation analysis by Rutherford Backscattering Spectrometry showed erosion of both Mo and Si layers for the highest energy 50 eV/D and exposure time 5.4 × 104 s. Nuclear Reaction Analysis revealed detectable deuterium retention for energies ⩾25 eV/D. Surface analysis by X-ray Photoelectron Spectroscopy showed erosion of the first Si layer for energies ⩾5 eV/D. Inferences on the spatial distribution of trapped deuterium are made on the basis of available data regarding deuterium retention in the materials in question",

keywords = "METIS-270304, IR-75238",

author = "Alexey Kuznetsov and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and M.A. Gleeson and K. Schmid and Frederik Bijkerk",

year = "2010",

doi = "10.1134/S1027451010040026",

language = "English",

volume = "4",

pages = "563--566",

journal = "Journal of surface investigation. X-ray, synchrotron and neutron techniques",

issn = "1027-4510",

publisher = "Pleiades Publishing",

number = "4",

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TY - JOUR

T1 - Hydrogen interaction with EUVL-relevant optical materials

AU - Kuznetsov, Alexey

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Gleeson, M.A.

AU - Schmid, K.

AU - Bijkerk, Frederik

PY - 2010

Y1 - 2010

N2 - Mo/Si multilayer mirrors were exposed to deuterium ions with well-defined energies in order to gain insight into the effects of Extreme UV light driven plasma generation on reflective elements in commercial lithography equipment. Post-irradiation analysis by Rutherford Backscattering Spectrometry showed erosion of both Mo and Si layers for the highest energy 50 eV/D and exposure time 5.4 × 104 s. Nuclear Reaction Analysis revealed detectable deuterium retention for energies ⩾25 eV/D. Surface analysis by X-ray Photoelectron Spectroscopy showed erosion of the first Si layer for energies ⩾5 eV/D. Inferences on the spatial distribution of trapped deuterium are made on the basis of available data regarding deuterium retention in the materials in question

AB - Mo/Si multilayer mirrors were exposed to deuterium ions with well-defined energies in order to gain insight into the effects of Extreme UV light driven plasma generation on reflective elements in commercial lithography equipment. Post-irradiation analysis by Rutherford Backscattering Spectrometry showed erosion of both Mo and Si layers for the highest energy 50 eV/D and exposure time 5.4 × 104 s. Nuclear Reaction Analysis revealed detectable deuterium retention for energies ⩾25 eV/D. Surface analysis by X-ray Photoelectron Spectroscopy showed erosion of the first Si layer for energies ⩾5 eV/D. Inferences on the spatial distribution of trapped deuterium are made on the basis of available data regarding deuterium retention in the materials in question

KW - METIS-270304

KW - IR-75238

U2 - 10.1134/S1027451010040026

DO - 10.1134/S1027451010040026

M3 - Article

SN - 1027-4510

VL - 4

SP - 563

EP - 566

JO - Journal of surface investigation. X-ray, synchrotron and neutron techniques

JF - Journal of surface investigation. X-ray, synchrotron and neutron techniques

IS - 4

ER -

Hydrogen interaction with EUVL-relevant optical materials

Abstract

Keywords

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