Hydrogen interaction with mirrors for EUVL lithography

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 19 Jan 2010
Event	Physics@FOM Veldhoven 2010 - NH Koningshof Veldhoven, Veldhoven, Netherlands Duration: 19 Jan 2010 → 20 Jan 2010

Conference	Physics@FOM Veldhoven 2010
Country/Territory	Netherlands
City	Veldhoven
Period	19/01/10 → 20/01/10
Other	Jaarlijkse bijeenkomst van Stichting FOM over fysica in Nederland

Keywords

@conference{ef7d8133d27b4615acec14417c358218,

title = "Hydrogen interaction with mirrors for EUVL lithography",

keywords = "METIS-265556",

author = "Alexey Kuznetsov and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and A.J. Gleeson and K. Schmid and Frederik Bijkerk",

year = "2010",

month = jan,

day = "19",

language = "English",

pages = "--",

note = "Physics@FOM Veldhoven 2010 ; Conference date: 19-01-2010 Through 20-01-2010",

}