Hydrogen particle and plasma interactions with heterogeneous structures

Alexey Kuznetsov

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

183 Downloads (Pure)

Abstract

Being of a versatile and diverse nature, the field of particle-material interaction physics has traditionally been driven by applications. Two important current drivers are materials research for thermonuclear reactors and photolithography at Extreme UV wavelength. These topics have in common that they both represent extreme conditions: high photon, particle and plasma fluxes lead to non-linear processes and complex interaction phenomena. Both focus on unravelling the material damage mechanisms involving the lightest atom, hydrogen, as the active particle. The use of a nano-scale layered material, mimicking the lithography application, afforded an opportunity to perform depth and material sensitive studies. The challenge to identify the respective processes has been undertaken in the current thesis.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
Award date18 Oct 2013
Place of PublicationEnschede
Publisher
Print ISBNs978-90-9027806-3
Publication statusPublished - 18 Oct 2013

Fingerprint

plasma interactions
particle interactions
theses
hydrogen
photolithography
flux (rate)
hydrogen atoms
lithography
reactors
interactions
damage
physics
photons
wavelengths

Keywords

  • IR-87587
  • METIS-298356

Cite this

Kuznetsov, A. (2013). Hydrogen particle and plasma interactions with heterogeneous structures. Enschede: Universiteit Twente.
Kuznetsov, Alexey. / Hydrogen particle and plasma interactions with heterogeneous structures. Enschede : Universiteit Twente, 2013. 157 p.
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Kuznetsov, A 2013, 'Hydrogen particle and plasma interactions with heterogeneous structures', University of Twente, Enschede.

Hydrogen particle and plasma interactions with heterogeneous structures. / Kuznetsov, Alexey.

Enschede : Universiteit Twente, 2013. 157 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

TY - THES

T1 - Hydrogen particle and plasma interactions with heterogeneous structures

AU - Kuznetsov, Alexey

N1 - promotiepremie 100% LPNO

PY - 2013/10/18

Y1 - 2013/10/18

N2 - Being of a versatile and diverse nature, the field of particle-material interaction physics has traditionally been driven by applications. Two important current drivers are materials research for thermonuclear reactors and photolithography at Extreme UV wavelength. These topics have in common that they both represent extreme conditions: high photon, particle and plasma fluxes lead to non-linear processes and complex interaction phenomena. Both focus on unravelling the material damage mechanisms involving the lightest atom, hydrogen, as the active particle. The use of a nano-scale layered material, mimicking the lithography application, afforded an opportunity to perform depth and material sensitive studies. The challenge to identify the respective processes has been undertaken in the current thesis.

AB - Being of a versatile and diverse nature, the field of particle-material interaction physics has traditionally been driven by applications. Two important current drivers are materials research for thermonuclear reactors and photolithography at Extreme UV wavelength. These topics have in common that they both represent extreme conditions: high photon, particle and plasma fluxes lead to non-linear processes and complex interaction phenomena. Both focus on unravelling the material damage mechanisms involving the lightest atom, hydrogen, as the active particle. The use of a nano-scale layered material, mimicking the lithography application, afforded an opportunity to perform depth and material sensitive studies. The challenge to identify the respective processes has been undertaken in the current thesis.

KW - IR-87587

KW - METIS-298356

M3 - PhD Thesis - Research external, graduation UT

SN - 978-90-9027806-3

PB - Universiteit Twente

CY - Enschede

ER -

Kuznetsov A. Hydrogen particle and plasma interactions with heterogeneous structures. Enschede: Universiteit Twente, 2013. 157 p.