@inproceedings{c1d820fcc4ca411e98f3b995b1b060a0,
title = "Hydrogen permeation behavior and hydride phase transition of bond-micromachined thin-film palladium membranes",
author = "S. Unnikrishnan and Prabowo, {E. G.} and Jansen, {H. V.} and Sanders, {R. G.P.} and Gardeniers, {J. G.E.} and Elwenspoek, {M. C.}",
year = "2010",
language = "English",
isbn = "9781617388514",
series = "20th Annual Meeting of the North American Membrane Society and 11th International Conference on Inorganic Membranes 2010, NAMS/ICIM 2010",
pages = "149--151",
booktitle = "20th Annual Meeting of the North American Membrane Society and 11th International Conference on Inorganic Membranes 2010, NAMS/ICIM 2010",
note = "20th Annual Meeting of the North American Membrane Society 2010, NAMS 2010 and 11th International Conference on Inorganic Membranes 2010, ICIM 2010 ; Conference date: 17-07-2010 Through 22-07-2010",
}