Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation

M. Dumitrescu, C. Cobianu, D. Lungu, D. Dascalu, A. Pascu, Albert van den Berg, Johannes G.E. Gardeniers, S. Kolev, C. Ducso, I. Barsony

Research output: Contribution to conferencePaper

71 Downloads (Pure)

Abstract

The application of commercial 3-D software `COSMOS' for the design and thermal analysis of the low power consumption test structures with dielectric membrane for gas microsensors is presented. Within this work, the simulation provides the estimation of the temperature profile on the active area and the whole membrane including the four bridges and the heating efficiency in the temperature range 20-500 °C. Unravelling of the heat loss mechanisms in terms of radiation, convection, conduction by air and solid materials during heat transfer on the dielectric membrane is reported for the first time as a mean to evaluate by 3-D simulation the contribution of technological processes and lay-out design to the total heat losses.
Original languageUndefined
Pages145-148
Number of pages4
DOIs
Publication statusPublished - 7 Oct 1997
Event20th International Semiconductor Conference, CAS'97 - Sinaia, Romania
Duration: 7 Oct 199711 Oct 1997
Conference number: 20

Conference

Conference20th International Semiconductor Conference, CAS'97
Abbreviated titleCAS 1997
CountryRomania
CitySinaia
Period7/10/9711/10/97

Keywords

  • EWI-13540
  • IR-65021

Cite this

Dumitrescu, M., Cobianu, C., Lungu, D., Dascalu, D., Pascu, A., van den Berg, A., ... Barsony, I. (1997). Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation. 145-148. Paper presented at 20th International Semiconductor Conference, CAS'97, Sinaia, Romania. https://doi.org/10.1109/SMICND.1997.651567