Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation

M. Dumitrescu; C. Cobianu; D. Lungu; D. Dascalu; A. Pascu; Albert van den Berg; Johannes G.E. Gardeniers; S. Kolev; C. Ducso; I. Barsony

doi:10.1109/SMICND.1997.651567

Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation

M. Dumitrescu, C. Cobianu, D. Lungu, D. Dascalu, A. Pascu, Albert van den Berg, Johannes G.E. Gardeniers, S. Kolev, C. Ducso, I. Barsony

Research output: Contribution to conference › Paper › peer-review

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Abstract

The application of commercial 3-D software `COSMOS' for the design and thermal analysis of the low power consumption test structures with dielectric membrane for gas microsensors is presented. Within this work, the simulation provides the estimation of the temperature profile on the active area and the whole membrane including the four bridges and the heating efficiency in the temperature range 20-500 °C. Unravelling of the heat loss mechanisms in terms of radiation, convection, conduction by air and solid materials during heat transfer on the dielectric membrane is reported for the first time as a mean to evaluate by 3-D simulation the contribution of technological processes and lay-out design to the total heat losses.

Original language	Undefined
Pages	145-148
Number of pages	4
DOIs	https://doi.org/10.1109/SMICND.1997.651567
Publication status	Published - 7 Oct 1997
Event	20th International Semiconductor Conference, CAS'97 - Sinaia, Romania Duration: 7 Oct 1997 → 11 Oct 1997 Conference number: 20

Conference

Conference	20th International Semiconductor Conference, CAS'97
Abbreviated title	CAS 1997
Country/Territory	Romania
City	Sinaia
Period	7/10/97 → 11/10/97

Keywords

EWI-13540
IR-65021

Access to Document

10.1109/SMICND.1997.651567

Cite this

Dumitrescu, M., Cobianu, C., Lungu, D., Dascalu, D., Pascu, A., van den Berg, A., Gardeniers, J. G. E., Kolev, S., Ducso, C., & Barsony, I. (1997). Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation. 145-148. Paper presented at 20th International Semiconductor Conference, CAS'97, Sinaia, Romania. https://doi.org/10.1109/SMICND.1997.651567

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title = "Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation",

abstract = "The application of commercial 3-D software `COSMOS' for the design and thermal analysis of the low power consumption test structures with dielectric membrane for gas microsensors is presented. Within this work, the simulation provides the estimation of the temperature profile on the active area and the whole membrane including the four bridges and the heating efficiency in the temperature range 20-500 °C. Unravelling of the heat loss mechanisms in terms of radiation, convection, conduction by air and solid materials during heat transfer on the dielectric membrane is reported for the first time as a mean to evaluate by 3-D simulation the contribution of technological processes and lay-out design to the total heat losses.",

keywords = "EWI-13540, IR-65021",

author = "M. Dumitrescu and C. Cobianu and D. Lungu and D. Dascalu and A. Pascu and {van den Berg}, Albert and Gardeniers, {Johannes G.E.} and S. Kolev and C. Ducso and I. Barsony",

year = "1997",

month = oct,

day = "7",

doi = "10.1109/SMICND.1997.651567",

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note = "20th International Semiconductor Conference, CAS'97 ; Conference date: 07-10-1997 Through 11-10-1997",

}

Dumitrescu, M, Cobianu, C, Lungu, D, Dascalu, D, Pascu, A, van den Berg, A , Gardeniers, JGE, Kolev, S, Ducso, C & Barsony, I 1997, 'Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation', Paper presented at 20th International Semiconductor Conference, CAS'97, Sinaia, Romania, 7/10/97 - 11/10/97 pp. 145-148. https://doi.org/10.1109/SMICND.1997.651567

TY - CONF

T1 - Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation

AU - Dumitrescu, M.

AU - Cobianu, C.

AU - Lungu, D.

AU - Dascalu, D.

AU - Pascu, A.

AU - van den Berg, Albert

AU - Gardeniers, Johannes G.E.

AU - Kolev, S.

AU - Ducso, C.

AU - Barsony, I.

N1 - Conference code: 20

PY - 1997/10/7

Y1 - 1997/10/7

N2 - The application of commercial 3-D software `COSMOS' for the design and thermal analysis of the low power consumption test structures with dielectric membrane for gas microsensors is presented. Within this work, the simulation provides the estimation of the temperature profile on the active area and the whole membrane including the four bridges and the heating efficiency in the temperature range 20-500 °C. Unravelling of the heat loss mechanisms in terms of radiation, convection, conduction by air and solid materials during heat transfer on the dielectric membrane is reported for the first time as a mean to evaluate by 3-D simulation the contribution of technological processes and lay-out design to the total heat losses.

AB - The application of commercial 3-D software `COSMOS' for the design and thermal analysis of the low power consumption test structures with dielectric membrane for gas microsensors is presented. Within this work, the simulation provides the estimation of the temperature profile on the active area and the whole membrane including the four bridges and the heating efficiency in the temperature range 20-500 °C. Unravelling of the heat loss mechanisms in terms of radiation, convection, conduction by air and solid materials during heat transfer on the dielectric membrane is reported for the first time as a mean to evaluate by 3-D simulation the contribution of technological processes and lay-out design to the total heat losses.

KW - EWI-13540

KW - IR-65021

U2 - 10.1109/SMICND.1997.651567

DO - 10.1109/SMICND.1997.651567

M3 - Paper

SP - 145

EP - 148

T2 - 20th International Semiconductor Conference, CAS'97

Y2 - 7 October 1997 through 11 October 1997

ER -