Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

M.P.J. Tiggelman, K. Reimann, J. Liu, M. Klee, W. Keur, R. Mauczock, Jurriaan Schmitz, Raymond Josephus Engelbart Hueting

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

16 Citations (Scopus)
328 Downloads (Pure)

Abstract

A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1–8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.
Original languageUndefined
Title of host publicationProceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures
Place of PublicationPiscataway
PublisherIEEE Computer Society Press
Pages190-195
Number of pages6
ISBN (Print)978-1-4244-1801-5
DOIs
Publication statusPublished - 24 Mar 2008
Event21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008 - University of Edinburgh, Edinburgh, United Kingdom
Duration: 24 Mar 200827 Mar 2008
Conference number: 21
http://www.homepages.ed.ac.uk/ajw/ICMTS/prog08.pdf

Publication series

Name
PublisherIEEE Computer Society Press
NumberDTR08-9

Conference

Conference21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008
Abbreviated titleICMTS
CountryUnited Kingdom
CityEdinburgh
Period24/03/0827/03/08
Internet address

Keywords

  • SC-ICF: Integrated Circuit Fabrication
  • METIS-251076
  • EWI-13056
  • IR-64874

Cite this

Tiggelman, M. P. J., Reimann, K., Liu, J., Klee, M., Keur, W., Mauczock, R., ... Hueting, R. J. E. (2008). Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. In Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures (pp. 190-195). [10.1109/ICMTS.2008.4509337] Piscataway: IEEE Computer Society Press. https://doi.org/10.1109/ICMTS.2008.4509337
Tiggelman, M.P.J. ; Reimann, K. ; Liu, J. ; Klee, M. ; Keur, W. ; Mauczock, R. ; Schmitz, Jurriaan ; Hueting, Raymond Josephus Engelbart. / Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures. Piscataway : IEEE Computer Society Press, 2008. pp. 190-195
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title = "Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies",
abstract = "A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1–8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.",
keywords = "SC-ICF: Integrated Circuit Fabrication, METIS-251076, EWI-13056, IR-64874",
author = "M.P.J. Tiggelman and K. Reimann and J. Liu and M. Klee and W. Keur and R. Mauczock and Jurriaan Schmitz and Hueting, {Raymond Josephus Engelbart}",
note = "IEEE catalog number CFP08MTS-CDR",
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month = "3",
day = "24",
doi = "10.1109/ICMTS.2008.4509337",
language = "Undefined",
isbn = "978-1-4244-1801-5",
publisher = "IEEE Computer Society Press",
number = "DTR08-9",
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Tiggelman, MPJ, Reimann, K, Liu, J, Klee, M, Keur, W, Mauczock, R, Schmitz, J & Hueting, RJE 2008, Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. in Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures., 10.1109/ICMTS.2008.4509337, IEEE Computer Society Press, Piscataway, pp. 190-195, 21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008, Edinburgh, United Kingdom, 24/03/08. https://doi.org/10.1109/ICMTS.2008.4509337

Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. / Tiggelman, M.P.J.; Reimann, K.; Liu, J.; Klee, M.; Keur, W.; Mauczock, R.; Schmitz, Jurriaan; Hueting, Raymond Josephus Engelbart.

Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures. Piscataway : IEEE Computer Society Press, 2008. p. 190-195 10.1109/ICMTS.2008.4509337.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

AU - Tiggelman, M.P.J.

AU - Reimann, K.

AU - Liu, J.

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AU - Keur, W.

AU - Mauczock, R.

AU - Schmitz, Jurriaan

AU - Hueting, Raymond Josephus Engelbart

N1 - IEEE catalog number CFP08MTS-CDR

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N2 - A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1–8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.

AB - A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1–8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.

KW - SC-ICF: Integrated Circuit Fabrication

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KW - EWI-13056

KW - IR-64874

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DO - 10.1109/ICMTS.2008.4509337

M3 - Conference contribution

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Tiggelman MPJ, Reimann K, Liu J, Klee M, Keur W, Mauczock R et al. Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. In Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures. Piscataway: IEEE Computer Society Press. 2008. p. 190-195. 10.1109/ICMTS.2008.4509337 https://doi.org/10.1109/ICMTS.2008.4509337