Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

M.P.J. Tiggelman, K. Reimann, J. Liu, M. Klee, W. Keur, R. Mauczock, Jurriaan Schmitz, Raymond Josephus Engelbart Hueting

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    19 Citations (Scopus)
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    A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1–8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.
    Original languageUndefined
    Title of host publicationProceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures
    Place of PublicationPiscataway
    PublisherIEEE Computer Society Press
    Number of pages6
    ISBN (Print)978-1-4244-1801-5
    Publication statusPublished - 24 Mar 2008
    Event21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008 - University of Edinburgh, Edinburgh, United Kingdom
    Duration: 24 Mar 200827 Mar 2008
    Conference number: 21

    Publication series

    PublisherIEEE Computer Society Press


    Conference21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008
    Abbreviated titleICMTS
    Country/TerritoryUnited Kingdom
    Internet address


    • SC-ICF: Integrated Circuit Fabrication
    • METIS-251076
    • EWI-13056
    • IR-64874

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