Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

M.P.J. Tiggelman; K. Reimann; J. Liu; M. Klee; W. Keur; R. Mauczock; Jurriaan Schmitz; Raymond Josephus Engelbart Hueting

doi:10.1109/ICMTS.2008.4509337

Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

M.P.J. Tiggelman, K. Reimann, J. Liu, M. Klee, W. Keur, R. Mauczock, Jurriaan Schmitz, Raymond Josephus Engelbart Hueting

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

23 Citations (Scopus)

661 Downloads (Pure)

Abstract

A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1–8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.

Original language	Undefined
Title of host publication	Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures
Place of Publication	Piscataway
Publisher	IEEE
Pages	190-195
Number of pages	6
ISBN (Print)	978-1-4244-1801-5
DOIs	https://doi.org/10.1109/ICMTS.2008.4509337
Publication status	Published - 24 Mar 2008
Event	21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008 - University of Edinburgh, Edinburgh, United Kingdom Duration: 24 Mar 2008 → 27 Mar 2008 Conference number: 21 http://www.homepages.ed.ac.uk/ajw/ICMTS/prog08.pdf

Publication series

Name
Publisher	IEEE Computer Society Press
Number	DTR08-9

Conference

Conference	21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008
Abbreviated title	ICMTS
Country/Territory	United Kingdom
City	Edinburgh
Period	24/03/08 → 27/03/08
Internet address	http://www.homepages.ed.ac.uk/ajw/ICMTS/prog08.pdf

Keywords

SC-ICF: Integrated Circuit Fabrication
METIS-251076
EWI-13056
IR-64874

Access to Document

10.1109/ICMTS.2008.4509337

Cite this

Tiggelman, M. P. J., Reimann, K., Liu, J., Klee, M., Keur, W., Mauczock, R., Schmitz, J., & Hueting, R. J. E. (2008). Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. In Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures (pp. 190-195). Article 10.1109/ICMTS.2008.4509337 IEEE. https://doi.org/10.1109/ICMTS.2008.4509337

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title = "Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies",

abstract = "A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1–8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.",

keywords = "SC-ICF: Integrated Circuit Fabrication, METIS-251076, EWI-13056, IR-64874",

author = "M.P.J. Tiggelman and K. Reimann and J. Liu and M. Klee and W. Keur and R. Mauczock and Jurriaan Schmitz and Hueting, {Raymond Josephus Engelbart}",

note = "IEEE catalog number CFP08MTS-CDR; 21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008 ; Conference date: 24-03-2008 Through 27-03-2008",

year = "2008",

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day = "24",

doi = "10.1109/ICMTS.2008.4509337",

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isbn = "978-1-4244-1801-5",

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Tiggelman, MPJ, Reimann, K, Liu, J, Klee, M, Keur, W, Mauczock, R, Schmitz, J & Hueting, RJE 2008, Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. in Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures., 10.1109/ICMTS.2008.4509337, IEEE, Piscataway, pp. 190-195, 21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008, Edinburgh, United Kingdom, 24/03/08. https://doi.org/10.1109/ICMTS.2008.4509337

Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. / Tiggelman, M.P.J.; Reimann, K.; Liu, J. et al.
Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures. Piscataway: IEEE, 2008. p. 190-195 10.1109/ICMTS.2008.4509337.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Keur, W.

AU - Mauczock, R.

AU - Schmitz, Jurriaan

AU - Hueting, Raymond Josephus Engelbart

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KW - EWI-13056

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