Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

M.P.J. Tiggelman, K. Reimann, J. Liu, M. Klee, W. Keur, R. Mauczock, Jurriaan Schmitz, Raymond Josephus Engelbart Hueting

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    16 Citations (Scopus)
    433 Downloads (Pure)

    Abstract

    A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1–8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.
    Original languageUndefined
    Title of host publicationProceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures
    Place of PublicationPiscataway
    PublisherIEEE Computer Society Press
    Pages190-195
    Number of pages6
    ISBN (Print)978-1-4244-1801-5
    DOIs
    Publication statusPublished - 24 Mar 2008
    Event21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008 - University of Edinburgh, Edinburgh, United Kingdom
    Duration: 24 Mar 200827 Mar 2008
    Conference number: 21
    http://www.homepages.ed.ac.uk/ajw/ICMTS/prog08.pdf

    Publication series

    Name
    PublisherIEEE Computer Society Press
    NumberDTR08-9

    Conference

    Conference21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008
    Abbreviated titleICMTS
    CountryUnited Kingdom
    CityEdinburgh
    Period24/03/0827/03/08
    Internet address

    Keywords

    • SC-ICF: Integrated Circuit Fabrication
    • METIS-251076
    • EWI-13056
    • IR-64874

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