Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

M.P.J. Tiggelman, K. Reimann, J. Liu, M. Klee, W. Keur, R. Mauczock, Jurriaan Schmitz, Raymond Josephus Engelbart Hueting

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    16 Citations (Scopus)
    403 Downloads (Pure)

    Abstract

    A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1–8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.
    Original languageUndefined
    Title of host publicationProceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures
    Place of PublicationPiscataway
    PublisherIEEE Computer Society Press
    Pages190-195
    Number of pages6
    ISBN (Print)978-1-4244-1801-5
    DOIs
    Publication statusPublished - 24 Mar 2008
    Event21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008 - University of Edinburgh, Edinburgh, United Kingdom
    Duration: 24 Mar 200827 Mar 2008
    Conference number: 21
    http://www.homepages.ed.ac.uk/ajw/ICMTS/prog08.pdf

    Publication series

    Name
    PublisherIEEE Computer Society Press
    NumberDTR08-9

    Conference

    Conference21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008
    Abbreviated titleICMTS
    CountryUnited Kingdom
    CityEdinburgh
    Period24/03/0827/03/08
    Internet address

    Keywords

    • SC-ICF: Integrated Circuit Fabrication
    • METIS-251076
    • EWI-13056
    • IR-64874

    Cite this

    Tiggelman, M. P. J., Reimann, K., Liu, J., Klee, M., Keur, W., Mauczock, R., ... Hueting, R. J. E. (2008). Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. In Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures (pp. 190-195). [10.1109/ICMTS.2008.4509337] Piscataway: IEEE Computer Society Press. https://doi.org/10.1109/ICMTS.2008.4509337