III-D: Non-lithographic micro patterning tools

David H.A. Blank; Augustinus J.H.M. Rijnders; Duc Minh Nguyen; Matthias Wessling; Rob G.H. Lammertink; J.G. van Bennekom; O. Bliznyuk; Bene Poelsema; Ernst S. Kooij; I. Shlyarevskiy; J. Kuznetsov; W. Nijdam

III-D: Non-lithographic micro patterning tools

David H.A. Blank, Augustinus J.H.M. Rijnders, Duc Minh Nguyen, Matthias Wessling, Rob G.H. Lammertink, J.G. van Bennekom, O. Bliznyuk, Bene Poelsema, Ernst S. Kooij, I. Shlyarevskiy, J. Kuznetsov, W. Nijdam

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 15 Nov 2007
Event	Netherlands MicroNanoConference 2007 - Wageningen, Netherlands Duration: 15 Nov 2007 → 16 Nov 2007

Conference

Conference	Netherlands MicroNanoConference 2007
Country/Territory	Netherlands
City	Wageningen
Period	15/11/07 → 16/11/07

Keywords

METIS-245229

Cite this

@conference{d522bd995d1e4055b04475be99e01c4e,

title = "III-D: Non-lithographic micro patterning tools",

keywords = "METIS-245229",

author = "Blank, {David H.A.} and Rijnders, {Augustinus J.H.M.} and Nguyen, {Duc Minh} and Matthias Wessling and Lammertink, {Rob G.H.} and {van Bennekom}, J.G. and O. Bliznyuk and Bene Poelsema and Kooij, {Ernst S.} and I. Shlyarevskiy and J. Kuznetsov and W. Nijdam",

year = "2007",

month = nov,

day = "15",

language = "English",

pages = "--",

note = "Netherlands MicroNanoConference 2007 ; Conference date: 15-11-2007 Through 16-11-2007",

}

TY - CONF

T1 - III-D: Non-lithographic micro patterning tools

AU - Blank, David H.A.

AU - Rijnders, Augustinus J.H.M.

AU - Nguyen, Duc Minh

AU - Wessling, Matthias

AU - Lammertink, Rob G.H.

AU - van Bennekom, J.G.

AU - Bliznyuk, O.

AU - Poelsema, Bene

AU - Kooij, Ernst S.

AU - Shlyarevskiy, I.

AU - Kuznetsov, J.

AU - Nijdam, W.

PY - 2007/11/15

Y1 - 2007/11/15

KW - METIS-245229

M3 - Poster

SP - -

T2 - Netherlands MicroNanoConference 2007

Y2 - 15 November 2007 through 16 November 2007

ER -