@conference{d522bd995d1e4055b04475be99e01c4e,
title = "III-D: Non-lithographic micro patterning tools",
author = "Blank, \{David H.A.\} and Rijnders, \{Augustinus J.H.M.\} and Nguyen, \{Duc Minh\} and Matthias Wessling and Lammertink, \{Rob G.H.\} and \{van Bennekom\}, J.G. and O. Bliznyuk and Bene Poelsema and Kooij, \{Ernst S.\} and I. Shlyarevskiy and J. Kuznetsov and W. Nijdam",
year = "2007",
month = nov,
day = "15",
language = "English",
note = "Netherlands MicroNanoConference 2007 ; Conference date: 15-11-2007 Through 16-11-2007",
}