Improved Al2O3 and SiO2-MOCVD-coatings by lowering the internal stresser

R. Hofman, R.W.J. Morssinkhof, J.G.F. Westheim, T. Fransen, P.J. Gellings

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 9 Jan 1992
Event	Bijeenkomst SON-werkgemeenschap voor Vaste Stoffen en Materiaalkunde 1992 - Lunteren, Netherlands Duration: 9 Jan 1992 → 9 Jan 1992

Seminar	Bijeenkomst SON-werkgemeenschap voor Vaste Stoffen en Materiaalkunde 1992
Country/Territory	Netherlands
City	Lunteren
Period	9/01/92 → 9/01/92

Keywords

@conference{a349965c8fd94fe4ae2d4920d229fde1,

title = "Improved Al2O3 and SiO2-MOCVD-coatings by lowering the internal stresser",

keywords = "METIS-110011",

author = "R. Hofman and R.W.J. Morssinkhof and J.G.F. Westheim and T. Fransen and P.J. Gellings",

year = "1992",

month = jan,

day = "9",

language = "English",

note = "Bijeenkomst SON-werkgemeenschap voor Vaste Stoffen en Materiaalkunde 1992 ; Conference date: 09-01-1992 Through 09-01-1992",

}

TY - CONF

T1 - Improved Al2O3 and SiO2-MOCVD-coatings by lowering the internal stresser

AU - Hofman, R.

AU - Morssinkhof, R.W.J.

AU - Westheim, J.G.F.

AU - Fransen, T.

AU - Gellings, P.J.

PY - 1992/1/9

Y1 - 1992/1/9

KW - METIS-110011

M3 - Poster

T2 - Bijeenkomst SON-werkgemeenschap voor Vaste Stoffen en Materiaalkunde 1992

Y2 - 9 January 1992 through 9 January 1992

ER -