Improved Al2O3 and SiO2 MOCVD-coatings by lowering the internal stresses

R. Hofman, R.W.J. Morssinkhof, J.G.F. Westheim, T. Fransen, P.J. Gellings

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Number of pages1
Publication statusPublished - 17 Sept 1991
EventPosterbijdrage Ceramitec - München, Duitsland
Duration: 17 Sept 1991 → …


ConferencePosterbijdrage Ceramitec
CityMünchen, Duitsland
Period17/09/91 → …


  • METIS-110000

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