Improved Al2O3 and SiO2 MOCVD-coatings by lowering the internal stresses

R. Hofman, R.W.J. Morsinkhof, J.G.F. Westheim, T. Fransen, P.J. Gellings

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 17 Sep 1991

Keywords

  • METIS-110000

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