Improved Al2O3 and SiO2 MOCVD-coatings by lowering the internal stresses

R. Hofman, R.W.J. Morssinkhof, J.G.F. Westheim, T. Fransen, P.J. Gellings

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 17 Sept 1991
Event	Posterbijdrage Ceramitec - München, Duitsland Duration: 17 Sept 1991 → …

Keywords

@conference{a2c5492a680d444fb465f0f40231209c,

title = "Improved Al2O3 and SiO2 MOCVD-coatings by lowering the internal stresses",

keywords = "METIS-110000",

author = "R. Hofman and R.W.J. Morssinkhof and J.G.F. Westheim and T. Fransen and P.J. Gellings",

year = "1991",

month = sep,

day = "17",

language = "English",

note = "Posterbijdrage Ceramitec ; Conference date: 17-09-1991",

}