Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Dennis Alveringh, D. Tsoukalas (Editor), Remco J. Wiegerink (Editor), Jarno Groenesteijn, U. Staufer (Editor), Joost Conrad Lötters

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
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Abstract

We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for three times increased sensitivity. Capacitive Coriolis mass flow sensors are normally read out by two electrodes that measure the ratio between the actuation mode and the Coriolis mode, which is induced by the mass flow. This ratio results in a phase shift between the two electrodes. By adding two additional read out electrodes, the actuation mode signal is partially canceled, allowing for higher sensitivity to the Coriolis mode, and thus larger phase shifts for the same mass flows. An analytical model is derived and corresponds with the measurements. It is also proven that the range and sensitivity of the sensor can be tuned by changing the size of the additional readout electrodes. This readout method does not increase the readout time.
Original languageUndefined
Pages (from-to)1-5
Number of pages5
JournalMicroelectronic engineering
Volume159
DOIs
Publication statusPublished - 15 Jun 2016

Keywords

  • EWI-26815
  • Coriolis flow sensor
  • Phase detection
  • Actuation mode cancelation
  • IR-99599
  • Capacitive readout
  • METIS-316038

Cite this

Alveringh, Dennis ; Tsoukalas, D. (Editor) ; Wiegerink, Remco J. (Editor) ; Groenesteijn, Jarno ; Staufer, U. (Editor) ; Lötters, Joost Conrad. / Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning. In: Microelectronic engineering. 2016 ; Vol. 159. pp. 1-5.
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abstract = "We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for three times increased sensitivity. Capacitive Coriolis mass flow sensors are normally read out by two electrodes that measure the ratio between the actuation mode and the Coriolis mode, which is induced by the mass flow. This ratio results in a phase shift between the two electrodes. By adding two additional read out electrodes, the actuation mode signal is partially canceled, allowing for higher sensitivity to the Coriolis mode, and thus larger phase shifts for the same mass flows. An analytical model is derived and corresponds with the measurements. It is also proven that the range and sensitivity of the sensor can be tuned by changing the size of the additional readout electrodes. This readout method does not increase the readout time.",
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Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning. / Alveringh, Dennis; Tsoukalas, D. (Editor); Wiegerink, Remco J. (Editor); Groenesteijn, Jarno; Staufer, U. (Editor); Lötters, Joost Conrad.

In: Microelectronic engineering, Vol. 159, 15.06.2016, p. 1-5.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

AU - Alveringh, Dennis

AU - Groenesteijn, Jarno

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AB - We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for three times increased sensitivity. Capacitive Coriolis mass flow sensors are normally read out by two electrodes that measure the ratio between the actuation mode and the Coriolis mode, which is induced by the mass flow. This ratio results in a phase shift between the two electrodes. By adding two additional read out electrodes, the actuation mode signal is partially canceled, allowing for higher sensitivity to the Coriolis mode, and thus larger phase shifts for the same mass flows. An analytical model is derived and corresponds with the measurements. It is also proven that the range and sensitivity of the sensor can be tuned by changing the size of the additional readout electrodes. This readout method does not increase the readout time.

KW - EWI-26815

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KW - Actuation mode cancelation

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KW - METIS-316038

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