Improved design of an actively modulated interferometer by the use of chemical mechanical polishing

  • B. Middelbos
  • , Rene Heideman
  • , C. Gui
  • , Paul Lambeck

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 23 Jun 1998

    Keywords

    • METIS-114622

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