Improved dicing method for the microflown particle velocity sensor

O. Pjetri; Remco J. Wiegerink; Henricus V. Jansen; Gijsbertus J.M. Krijnen

Improved dicing method for the microflown particle velocity sensor

O. Pjetri, Remco J. Wiegerink, Henricus V. Jansen, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89%.

Original language	Undefined
Title of host publication	23rd Micromechanics And Microsystems Europe Workshop, 2012
Place of Publication	Ilmenau
Publisher	Ilmenau University of Technology
Pages	-
Number of pages	4
ISBN (Print)	978-3-938843-71-0
Publication status	Published - 2012
Event	23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany Duration: 9 Sep 2012 → 12 Sep 2012 Conference number: 23

Publication series

Name
Publisher	Ilmenau University of Technology

Workshop

Workshop	23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Abbreviated title	MME
Country	Germany
City	Ilmenau
Period	9/09/12 → 12/09/12

Keywords

EWI-22602
METIS-296154
IR-84168

Access to Document

http://eprints.eemcs.utwente.nl/secure2/22602/01/Pjetri2012_MME.pdf

Cite this

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title = "Improved dicing method for the microflown particle velocity sensor",

abstract = "We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89%.",

keywords = "EWI-22602, METIS-296154, IR-84168",

author = "O. Pjetri and Wiegerink, {Remco J.} and Jansen, {Henricus V.} and Krijnen, {Gijsbertus J.M.}",

year = "2012",

language = "Undefined",

isbn = "978-3-938843-71-0",

publisher = "Ilmenau University of Technology",

pages = "--",

booktitle = "23rd Micromechanics And Microsystems Europe Workshop, 2012",

note = "null ; Conference date: 09-09-2012 Through 12-09-2012",

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Pjetri, O, Wiegerink, RJ, Jansen, HV & Krijnen, GJM 2012, Improved dicing method for the microflown particle velocity sensor. in 23rd Micromechanics And Microsystems Europe Workshop, 2012. Ilmenau University of Technology, Ilmenau, pp. -, 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, Ilmenau, Germany, 9/09/12. <http://eprints.eemcs.utwente.nl/secure2/22602/01/Pjetri2012_MME.pdf>

TY - GEN

T1 - Improved dicing method for the microflown particle velocity sensor

AU - Pjetri, O.

AU - Wiegerink, Remco J.

AU - Jansen, Henricus V.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 23

PY - 2012

Y1 - 2012

N2 - We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89%.

AB - We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89%.

KW - EWI-22602

KW - METIS-296154

KW - IR-84168

M3 - Conference contribution

SN - 978-3-938843-71-0

SP - -

BT - 23rd Micromechanics And Microsystems Europe Workshop, 2012

PB - Ilmenau University of Technology

CY - Ilmenau

Y2 - 9 September 2012 through 12 September 2012

ER -