Improved dicing method for the microflown particle velocity sensor

O. Pjetri, Remco J. Wiegerink, Henricus V. Jansen, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89%.
Original languageUndefined
Title of host publication23rd Micromechanics And Microsystems Europe Workshop, 2012
Place of PublicationIlmenau
PublisherIlmenau University of Technology
Pages-
Number of pages4
ISBN (Print)978-3-938843-71-0
Publication statusPublished - 2012
Event23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany
Duration: 9 Sep 201212 Sep 2012
Conference number: 23

Publication series

Name
PublisherIlmenau University of Technology

Workshop

Workshop23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Abbreviated titleMME
CountryGermany
CityIlmenau
Period9/09/1212/09/12

Keywords

  • EWI-22602
  • METIS-296154
  • IR-84168

Cite this

Pjetri, O., Wiegerink, R. J., Jansen, H. V., & Krijnen, G. J. M. (2012). Improved dicing method for the microflown particle velocity sensor. In 23rd Micromechanics And Microsystems Europe Workshop, 2012 (pp. -). Ilmenau: Ilmenau University of Technology.
Pjetri, O. ; Wiegerink, Remco J. ; Jansen, Henricus V. ; Krijnen, Gijsbertus J.M. / Improved dicing method for the microflown particle velocity sensor. 23rd Micromechanics And Microsystems Europe Workshop, 2012. Ilmenau : Ilmenau University of Technology, 2012. pp. -
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title = "Improved dicing method for the microflown particle velocity sensor",
abstract = "We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89{\%}.",
keywords = "EWI-22602, METIS-296154, IR-84168",
author = "O. Pjetri and Wiegerink, {Remco J.} and Jansen, {Henricus V.} and Krijnen, {Gijsbertus J.M.}",
year = "2012",
language = "Undefined",
isbn = "978-3-938843-71-0",
publisher = "Ilmenau University of Technology",
pages = "--",
booktitle = "23rd Micromechanics And Microsystems Europe Workshop, 2012",

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Pjetri, O, Wiegerink, RJ, Jansen, HV & Krijnen, GJM 2012, Improved dicing method for the microflown particle velocity sensor. in 23rd Micromechanics And Microsystems Europe Workshop, 2012. Ilmenau University of Technology, Ilmenau, pp. -, 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, Ilmenau, Germany, 9/09/12.

Improved dicing method for the microflown particle velocity sensor. / Pjetri, O.; Wiegerink, Remco J.; Jansen, Henricus V.; Krijnen, Gijsbertus J.M.

23rd Micromechanics And Microsystems Europe Workshop, 2012. Ilmenau : Ilmenau University of Technology, 2012. p. -.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Improved dicing method for the microflown particle velocity sensor

AU - Pjetri, O.

AU - Wiegerink, Remco J.

AU - Jansen, Henricus V.

AU - Krijnen, Gijsbertus J.M.

PY - 2012

Y1 - 2012

N2 - We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89%.

AB - We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89%.

KW - EWI-22602

KW - METIS-296154

KW - IR-84168

M3 - Conference contribution

SN - 978-3-938843-71-0

SP - -

BT - 23rd Micromechanics And Microsystems Europe Workshop, 2012

PB - Ilmenau University of Technology

CY - Ilmenau

ER -

Pjetri O, Wiegerink RJ, Jansen HV, Krijnen GJM. Improved dicing method for the microflown particle velocity sensor. In 23rd Micromechanics And Microsystems Europe Workshop, 2012. Ilmenau: Ilmenau University of Technology. 2012. p. -