Abstract
We report on progress in the fabrication
of the microflown particle velocity sensor. The
microflown is an acoustic sensor which measures
the particle velocity part of sound, contrary to
conventional microphones that measure acoustic
pressure. It consists of three silicon nitride beams
(1500μm x 2μm x 0.18μm) with a platinum layer
on top. The last process of the fabrication involves
protecting the wires with photo resist followed by
dicing. We present a new fabrication method where
the devices are diced before releasing the wires thus
drastically decreasing the chance of damaging the
beams. Preliminary results show a yield of 89%.
Original language | Undefined |
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Title of host publication | 23rd Micromechanics And Microsystems Europe Workshop, 2012 |
Place of Publication | Ilmenau |
Publisher | Ilmenau University of Technology |
Pages | - |
Number of pages | 4 |
ISBN (Print) | 978-3-938843-71-0 |
Publication status | Published - 2012 |
Event | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany Duration: 9 Sept 2012 → 12 Sept 2012 Conference number: 23 |
Publication series
Name | |
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Publisher | Ilmenau University of Technology |
Workshop
Workshop | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 |
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Abbreviated title | MME |
Country/Territory | Germany |
City | Ilmenau |
Period | 9/09/12 → 12/09/12 |
Keywords
- EWI-22602
- METIS-296154
- IR-84168