Improved dicing method for the microflown particle velocity sensor

O. Pjetri, Remco J. Wiegerink, Henricus V. Jansen, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic


    We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89%.
    Original languageUndefined
    Title of host publication23rd Micromechanics And Microsystems Europe Workshop, 2012
    Place of PublicationIlmenau
    PublisherIlmenau University of Technology
    Number of pages4
    ISBN (Print)978-3-938843-71-0
    Publication statusPublished - 2012
    Event23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany
    Duration: 9 Sep 201212 Sep 2012
    Conference number: 23

    Publication series

    PublisherIlmenau University of Technology


    Workshop23rd Micromechanics and Microsystems Europe Workshop, MME 2012
    Abbreviated titleMME


    • EWI-22602
    • METIS-296154
    • IR-84168

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