Abstract
| Original language | Undefined |
|---|---|
| Title of host publication | 23rd Micromechanics And Microsystems Europe Workshop, 2012 |
| Place of Publication | Ilmenau |
| Publisher | Ilmenau University of Technology |
| Pages | - |
| Number of pages | 4 |
| ISBN (Print) | 978-3-938843-71-0 |
| Publication status | Published - 2012 |
| Event | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany Duration: 9 Sep 2012 → 12 Sep 2012 Conference number: 23 |
Publication series
| Name | |
|---|---|
| Publisher | Ilmenau University of Technology |
Workshop
| Workshop | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 |
|---|---|
| Abbreviated title | MME |
| Country | Germany |
| City | Ilmenau |
| Period | 9/09/12 → 12/09/12 |
Keywords
- EWI-22602
- METIS-296154
- IR-84168
Cite this
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Improved dicing method for the microflown particle velocity sensor. / Pjetri, O.; Wiegerink, Remco J.; Jansen, Henricus V.; Krijnen, Gijsbertus J.M.
23rd Micromechanics And Microsystems Europe Workshop, 2012. Ilmenau : Ilmenau University of Technology, 2012. p. -.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
TY - GEN
T1 - Improved dicing method for the microflown particle velocity sensor
AU - Pjetri, O.
AU - Wiegerink, Remco J.
AU - Jansen, Henricus V.
AU - Krijnen, Gijsbertus J.M.
PY - 2012
Y1 - 2012
N2 - We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89%.
AB - We report on progress in the fabrication of the microflown particle velocity sensor. The microflown is an acoustic sensor which measures the particle velocity part of sound, contrary to conventional microphones that measure acoustic pressure. It consists of three silicon nitride beams (1500μm x 2μm x 0.18μm) with a platinum layer on top. The last process of the fabrication involves protecting the wires with photo resist followed by dicing. We present a new fabrication method where the devices are diced before releasing the wires thus drastically decreasing the chance of damaging the beams. Preliminary results show a yield of 89%.
KW - EWI-22602
KW - METIS-296154
KW - IR-84168
M3 - Conference contribution
SN - 978-3-938843-71-0
SP - -
BT - 23rd Micromechanics And Microsystems Europe Workshop, 2012
PB - Ilmenau University of Technology
CY - Ilmenau
ER -