Improved performance of large stroke comb-drive actuators by using a stepped finger shape

Johannes Bernardus Charles Engelen, M.A. Lantz, H.E. Rothuizen, Leon Abelmann, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    14 Citations (Scopus)
    60 Downloads (Pure)

    Abstract

    In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes.
    Original languageUndefined
    Title of host publicationThe 15th International Conference on Solid-State Sensors, Actuators and Microsystems
    Place of PublicationNew York
    PublisherIEEE
    Pages1762-1765
    Number of pages4
    ISBN (Print)978-1-4244-4190-7
    DOIs
    Publication statusPublished - Jun 2009
    Event15th International Conference on Solid-State Sensors, Actuators and Microsystems - Sheraton Denver Hotel, Denver, United States
    Duration: 21 Jun 200925 Jun 2009
    Conference number: 15

    Publication series

    Name
    PublisherIEEE
    NumberCFP09SSA-P

    Conference

    Conference15th International Conference on Solid-State Sensors, Actuators and Microsystems
    Abbreviated titleTRANSDUCERS 2009
    Country/TerritoryUnited States
    CityDenver
    Period21/06/0925/06/09

    Keywords

    • METIS-264011
    • IR-68147
    • TST-uSPAM: micro Scanning Probe Array Memory
    • TST-SMI: Formerly in EWI-SMI
    • EWI-16036

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