Improved performance of large stroke comb-drive actuators by using a stepped finger shape

Johannes Bernardus Charles Engelen; M.A. Lantz; H.E. Rothuizen; Leon Abelmann; Michael Curt Elwenspoek

doi:10.1109/SENSOR.2009.5285744

Improved performance of large stroke comb-drive actuators by using a stepped finger shape

Johannes Bernardus Charles Engelen, M.A. Lantz, H.E. Rothuizen, Leon Abelmann, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

14 Citations (Scopus)

32 Downloads (Pure)

Abstract

In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes.

Original language	Undefined
Title of host publication	The 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Place of Publication	New York
Publisher	IEEE
Pages	1762-1765
Number of pages	4
ISBN (Print)	978-1-4244-4190-7
DOIs	https://doi.org/10.1109/SENSOR.2009.5285744
Publication status	Published - Jun 2009
Event	15th International Conference on Solid-State Sensors, Actuators and Microsystems - Sheraton Denver Hotel, Denver, United States Duration: 21 Jun 2009 → 25 Jun 2009 Conference number: 15

Publication series

Name
Publisher	IEEE
Number	CFP09SSA-P

Conference

Conference	15th International Conference on Solid-State Sensors, Actuators and Microsystems
Abbreviated title	TRANSDUCERS 2009
Country/Territory	United States
City	Denver
Period	21/06/09 → 25/06/09

Keywords

METIS-264011
IR-68147
TST-uSPAM: micro Scanning Probe Array Memory
TST-SMI: Formerly in EWI-SMI
EWI-16036

Access to Document

10.1109/SENSOR.2009.5285744

Improved_perf

Cite this

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title = "Improved performance of large stroke comb-drive actuators by using a stepped finger shape",

abstract = "In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes.",

keywords = "METIS-264011, IR-68147, TST-uSPAM: micro Scanning Probe Array Memory, TST-SMI: Formerly in EWI-SMI, EWI-16036",

author = "Engelen, {Johannes Bernardus Charles} and M.A. Lantz and H.E. Rothuizen and Leon Abelmann and Elwenspoek, {Michael Curt}",

note = "10.1109/SENSOR.2009.5285744 ; null ; Conference date: 21-06-2009 Through 25-06-2009",

year = "2009",

month = jun,

doi = "10.1109/SENSOR.2009.5285744",

language = "Undefined",

isbn = "978-1-4244-4190-7",

publisher = "IEEE",

number = "CFP09SSA-P",

pages = "1762--1765",

booktitle = "The 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

}

Engelen, JBC, Lantz, MA, Rothuizen, HE, Abelmann, L & Elwenspoek, MC 2009, Improved performance of large stroke comb-drive actuators by using a stepped finger shape. in The 15th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, New York, pp. 1762-1765, 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, Colorado, United States, 21/06/09. https://doi.org/10.1109/SENSOR.2009.5285744

Improved performance of large stroke comb-drive actuators by using a stepped finger shape. / Engelen, Johannes Bernardus Charles; Lantz, M.A.; Rothuizen, H.E. et al.

The 15th International Conference on Solid-State Sensors, Actuators and Microsystems. New York : IEEE, 2009. p. 1762-1765.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Improved performance of large stroke comb-drive actuators by using a stepped finger shape

AU - Engelen, Johannes Bernardus Charles

AU - Lantz, M.A.

AU - Rothuizen, H.E.

AU - Abelmann, Leon

AU - Elwenspoek, Michael Curt

N1 - Conference code: 15

PY - 2009/6

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N2 - In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes.

AB - In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes.

KW - METIS-264011

KW - IR-68147

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - TST-SMI: Formerly in EWI-SMI

KW - EWI-16036

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DO - 10.1109/SENSOR.2009.5285744

M3 - Conference contribution

SN - 978-1-4244-4190-7

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EP - 1765

BT - The 15th International Conference on Solid-State Sensors, Actuators and Microsystems

PB - IEEE

CY - New York

Y2 - 21 June 2009 through 25 June 2009

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