Improved performance of large stroke comb-drive actuators by using a stepped finger shape

Johannes Bernardus Charles Engelen, M.A. Lantz, H.E. Rothuizen, Leon Abelmann, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    14 Citations (Scopus)
    33 Downloads (Pure)

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