Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes

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    Abstract

    We report an improved fabrication process of PDMS-based hybrid chips at the scale of a whole wafer and including an alignment step. This implies a control of the dimension variations of this elastomer upon temperature changes and the production of a PDMS wafer compatible with the use of standard alignment and bonding equipment. We illustrate the applicability of the process for the production of PDMS-glass microchips including electrodes; final alignment in routine was of 40 �?�m at the end of the process.
    Original languageUndefined
    Title of host publicationEleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference
    EditorsJ.L. Viovy, P Tabeling, S. Descroix, L. Malaquin
    Place of PublicationSan Diego
    PublisherThe Chemical and Biological Microsystems Society
    Pages1756-1758
    Number of pages3
    ISBN (Print)978-0-9798064-0-7
    Publication statusPublished - 7 Oct 2007
    Event11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007 - Paris, France
    Duration: 7 Oct 200711 Oct 2007
    Conference number: 11

    Publication series

    NameMicro Total Analysis Systems
    PublisherChemical and Biological Microsystems Society
    Volume2

    Conference

    Conference11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007
    Abbreviated titleMicroTAS
    Country/TerritoryFrance
    CityParis
    Period7/10/0711/10/07

    Keywords

    • EWI-11488
    • IR-62037
    • METIS-247037

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