Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes

J. Li; Severine le Gac; Albert van den Berg

Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes

J. Li, Severine le Gac, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We report an improved fabrication process of PDMS-based hybrid chips at the scale of a whole wafer and including an alignment step. This implies a control of the dimension variations of this elastomer upon temperature changes and the production of a PDMS wafer compatible with the use of standard alignment and bonding equipment. We illustrate the applicability of the process for the production of PDMS-glass microchips including electrodes; final alignment in routine was of 40 �?�m at the end of the process.

Original language	Undefined
Title of host publication	Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference
Editors	J.L. Viovy, P Tabeling, S. Descroix, L. Malaquin
Place of Publication	San Diego
Publisher	The Chemical and Biological Microsystems Society
Pages	1756-1758
Number of pages	3
ISBN (Print)	978-0-9798064-0-7
Publication status	Published - 7 Oct 2007
Event	11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007 - Paris, France Duration: 7 Oct 2007 → 11 Oct 2007 Conference number: 11

Publication series

Name	Micro Total Analysis Systems
Publisher	Chemical and Biological Microsystems Society
Volume	2

Conference

Conference	11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007
Abbreviated title	MicroTAS
Country/Territory	France
City	Paris
Period	7/10/07 → 11/10/07

Keywords

EWI-11488
IR-62037
METIS-247037

Access to Document

http://eprints.eemcs.utwente.nl/secure2/11488/01/Li0773t.pdf

Cite this

Li, J., le Gac, S., & van den Berg, A. (2007). Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes. In J. L. Viovy, P. Tabeling, S. Descroix, & L. Malaquin (Eds.), Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference (pp. 1756-1758). (Micro Total Analysis Systems; Vol. 2). The Chemical and Biological Microsystems Society. http://eprints.eemcs.utwente.nl/secure2/11488/01/Li0773t.pdf

Li, J. ; le Gac, Severine ; van den Berg, Albert. / Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes. Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. editor / J.L. Viovy ; P Tabeling ; S. Descroix ; L. Malaquin. San Diego : The Chemical and Biological Microsystems Society, 2007. pp. 1756-1758 (Micro Total Analysis Systems).

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title = "Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes",

abstract = "We report an improved fabrication process of PDMS-based hybrid chips at the scale of a whole wafer and including an alignment step. This implies a control of the dimension variations of this elastomer upon temperature changes and the production of a PDMS wafer compatible with the use of standard alignment and bonding equipment. We illustrate the applicability of the process for the production of PDMS-glass microchips including electrodes; final alignment in routine was of 40 �?�m at the end of the process.",

keywords = "EWI-11488, IR-62037, METIS-247037",

author = "J. Li and {le Gac}, Severine and {van den Berg}, Albert",

year = "2007",

month = oct,

day = "7",

language = "Undefined",

isbn = "978-0-9798064-0-7",

series = "Micro Total Analysis Systems",

publisher = "The Chemical and Biological Microsystems Society",

pages = "1756--1758",

editor = "J.L. Viovy and P Tabeling and S. Descroix and L. Malaquin",

booktitle = "Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference",

note = "11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007 ; Conference date: 07-10-2007 Through 11-10-2007",

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Li, J, le Gac, S & van den Berg, A 2007, Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes. in JL Viovy, P Tabeling, S Descroix & L Malaquin (eds), Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. Micro Total Analysis Systems, vol. 2, The Chemical and Biological Microsystems Society, San Diego, pp. 1756-1758, 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007, Paris, France, 7/10/07. <http://eprints.eemcs.utwente.nl/secure2/11488/01/Li0773t.pdf>

Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes. / Li, J.; le Gac, Severine ; van den Berg, Albert.
Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. ed. / J.L. Viovy; P Tabeling; S. Descroix; L. Malaquin. San Diego: The Chemical and Biological Microsystems Society, 2007. p. 1756-1758 (Micro Total Analysis Systems; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes

AU - Li, J.

AU - le Gac, Severine

AU - van den Berg, Albert

N1 - Conference code: 11

PY - 2007/10/7

Y1 - 2007/10/7

N2 - We report an improved fabrication process of PDMS-based hybrid chips at the scale of a whole wafer and including an alignment step. This implies a control of the dimension variations of this elastomer upon temperature changes and the production of a PDMS wafer compatible with the use of standard alignment and bonding equipment. We illustrate the applicability of the process for the production of PDMS-glass microchips including electrodes; final alignment in routine was of 40 �?�m at the end of the process.

AB - We report an improved fabrication process of PDMS-based hybrid chips at the scale of a whole wafer and including an alignment step. This implies a control of the dimension variations of this elastomer upon temperature changes and the production of a PDMS wafer compatible with the use of standard alignment and bonding equipment. We illustrate the applicability of the process for the production of PDMS-glass microchips including electrodes; final alignment in routine was of 40 �?�m at the end of the process.

KW - EWI-11488

KW - IR-62037

KW - METIS-247037

M3 - Conference contribution

SN - 978-0-9798064-0-7

T3 - Micro Total Analysis Systems

SP - 1756

EP - 1758

BT - Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference

A2 - Viovy, J.L.

A2 - Tabeling, P

A2 - Descroix, S.

A2 - Malaquin, L.

PB - The Chemical and Biological Microsystems Society

CY - San Diego

T2 - 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007

Y2 - 7 October 2007 through 11 October 2007

ER -

Li J, le Gac S , van den Berg A. Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes. In Viovy JL, Tabeling P, Descroix S, Malaquin L, editors, Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. San Diego: The Chemical and Biological Microsystems Society. 2007. p. 1756-1758. (Micro Total Analysis Systems).