Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes

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    Abstract

    We report an improved fabrication process of PDMS-based hybrid chips at the scale of a whole wafer and including an alignment step. This implies a control of the dimension variations of this elastomer upon temperature changes and the production of a PDMS wafer compatible with the use of standard alignment and bonding equipment. We illustrate the applicability of the process for the production of PDMS-glass microchips including electrodes; final alignment in routine was of 40 �?�m at the end of the process.
    Original languageUndefined
    Title of host publicationEleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference
    EditorsJ.L. Viovy, P Tabeling, S. Descroix, L. Malaquin
    Place of PublicationSan Diego
    PublisherChemical and Biological Micro Systems Society
    Pages1756-1758
    Number of pages3
    ISBN (Print)978-0-9798064-0-7
    Publication statusPublished - 7 Oct 2007
    Event11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007 - Paris, France
    Duration: 7 Oct 200711 Oct 2007
    Conference number: 11

    Publication series

    NameMicro Total Analysis Systems
    PublisherChemical and Biological Microsystems Society
    Volume2

    Conference

    Conference11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007
    Abbreviated titleMicroTAS
    CountryFrance
    CityParis
    Period7/10/0711/10/07

    Keywords

    • EWI-11488
    • IR-62037
    • METIS-247037

    Cite this

    Li, J., le Gac, S., & van den Berg, A. (2007). Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes. In J. L. Viovy, P. Tabeling, S. Descroix, & L. Malaquin (Eds.), Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference (pp. 1756-1758). (Micro Total Analysis Systems; Vol. 2). San Diego: Chemical and Biological Micro Systems Society.