Improving the performance of biomimetic hair-flow sensors by electrostatic spring softening

H. Droogendijk, C.M. Bruinink, Remco G.P. Sanders, A.M.K. Dagamseh, Remco J. Wiegerink, Gijsbertus J.M. Krijnen

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    23 Citations (Scopus)

    Abstract

    We report improvements in the detection limit and esponsivity of biomimetic hair-flow sensors by electrostatic spring softening. Applying a dc-bias voltage to our capacitive flow sensors results in a reduced sensory threshold, improving the mechanical transfer and flow detection limit by more than 6 dB. We further show that the sensor’s responsivity for airflows is also improved on application of high-frequency ac-bias voltages to the sensor’s capacitive structures with little sensitivity to the bias frequency.
    Original languageUndefined
    Pages (from-to)065026
    Number of pages9
    JournalJournal of micromechanics and microengineering
    Volume22
    Issue number6
    DOIs
    Publication statusPublished - 22 May 2012

    Keywords

    • Flow sensor
    • EWI-21852
    • TST-Life like
    • Adaptation
    • Biomimetic
    • IR-80407
    • METIS-286358
    • Electrostatic spring softening
    • Hair

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