We report improvements in the detection limit and esponsivity of biomimetic hair-flow sensors by electrostatic spring softening. Applying a dc-bias voltage to our capacitive flow sensors results in a reduced sensory threshold, improving the mechanical transfer and flow detection limit by more than 6 dB. We further show that the sensor’s responsivity for airflows is also improved on application of high-frequency ac-bias voltages to the sensor’s capacitive structures with little sensitivity to the bias frequency.
- Flow sensor
- TST-Life like
- Electrostatic spring softening
Droogendijk, H., Bruinink, C. M., Sanders, R. G. P., Dagamseh, A. M. K., Wiegerink, R. J., & Krijnen, G. J. M. (2012). Improving the performance of biomimetic hair-flow sensors by electrostatic spring softening. Journal of micromechanics and microengineering, 22(6), 065026. https://doi.org/10.1088/0960-1317/22/6/065026