TY - JOUR
T1 - In-chip direct laser writing of a centimeter-scale acoustic micromixer
AU - van 't Oever, Jorick
AU - Spannenburg, Niels
AU - Offerhaus, Herman L.
AU - van den Ende, Dirk
AU - Herek, Jennifer L.
AU - Mugele, Frieder
N1 - Open access
PY - 2015/4/21
Y1 - 2015/4/21
N2 - A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20 μm×20 μm×155 μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30 μm s −1 . The fabrication method allows for large flexibility and more complex designs
AB - A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20 μm×20 μm×155 μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30 μm s −1 . The fabrication method allows for large flexibility and more complex designs
U2 - 10.1117/1.JMM.14.2.023503
DO - 10.1117/1.JMM.14.2.023503
M3 - Article
SN - 1932-5150
VL - 14
JO - Journal of micro/nanolithography, MEMS, and MOEMS
JF - Journal of micro/nanolithography, MEMS, and MOEMS
IS - 2
M1 - 023503
ER -
