In-chip direct laser writing of a centimeter-scale acoustic micromixer

Jorick van 't Oever, Niels Spannenburg, Herman L. Offerhaus, Dirk van den Ende, Jennifer L. Herek, Frieder Mugele

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)
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Abstract

A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20  μm×20  μm×155  μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30  μm s −1 . The fabrication method allows for large flexibility and more complex designs
Original languageEnglish
Article number023503
JournalJournal of micro/nanolithography, MEMS, and MOEMS
Volume14
Issue number2
DOIs
Publication statusPublished - 21 Apr 2015

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