In-chip direct laser writing of a centimeter-scale acoustic micromixer

Jan Joannes Frederik van 't Oever, N.K. Spannenburg, Herman L. Offerhaus, Henricus T.M. van den Ende, Jennifer Lynn Herek, Friedrich Gunther Mugele

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
42 Downloads (Pure)

Abstract

A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20  μm×20  μm×155  μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30  μm s −1 . The fabrication method allows for large flexibility and more complex designs
Original languageEnglish
Article number023503
Pages (from-to)023503-
JournalJournal of micro/nanolithography, MEMS, and MOEMS
Volume14
Issue number2
DOIs
Publication statusPublished - 21 Apr 2015

Fingerprint

Acoustic streaming
acrylates
microchannels
Microchannels
actuation
flexibility
Photons
polymerization
ultrasonics
Ultrasonics
Acoustics
chips
Polymerization
Fabrication
fabrication
acoustics
Lasers
photons
lasers
acrylic acid

Keywords

  • METIS-310616
  • IR-96688

Cite this

@article{24d436bb9f85470f904810077de4fcf1,
title = "In-chip direct laser writing of a centimeter-scale acoustic micromixer",
abstract = "A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20  μm×20  μm×155  μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30  μm s −1 . The fabrication method allows for large flexibility and more complex designs",
keywords = "METIS-310616, IR-96688",
author = "{van 't Oever}, {Jan Joannes Frederik} and N.K. Spannenburg and Offerhaus, {Herman L.} and {van den Ende}, {Henricus T.M.} and Herek, {Jennifer Lynn} and Mugele, {Friedrich Gunther}",
note = "Open access",
year = "2015",
month = "4",
day = "21",
doi = "10.1117/1.JMM.14.2.023503",
language = "English",
volume = "14",
pages = "023503--",
journal = "Journal of micro/nanolithography, MEMS, and MOEMS",
issn = "1932-5150",
publisher = "SPIE",
number = "2",

}

In-chip direct laser writing of a centimeter-scale acoustic micromixer. / van 't Oever, Jan Joannes Frederik; Spannenburg, N.K.; Offerhaus, Herman L.; van den Ende, Henricus T.M.; Herek, Jennifer Lynn; Mugele, Friedrich Gunther.

In: Journal of micro/nanolithography, MEMS, and MOEMS, Vol. 14, No. 2, 023503, 21.04.2015, p. 023503-.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - In-chip direct laser writing of a centimeter-scale acoustic micromixer

AU - van 't Oever, Jan Joannes Frederik

AU - Spannenburg, N.K.

AU - Offerhaus, Herman L.

AU - van den Ende, Henricus T.M.

AU - Herek, Jennifer Lynn

AU - Mugele, Friedrich Gunther

N1 - Open access

PY - 2015/4/21

Y1 - 2015/4/21

N2 - A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20  μm×20  μm×155  μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30  μm s −1 . The fabrication method allows for large flexibility and more complex designs

AB - A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20  μm×20  μm×155  μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30  μm s −1 . The fabrication method allows for large flexibility and more complex designs

KW - METIS-310616

KW - IR-96688

U2 - 10.1117/1.JMM.14.2.023503

DO - 10.1117/1.JMM.14.2.023503

M3 - Article

VL - 14

SP - 023503-

JO - Journal of micro/nanolithography, MEMS, and MOEMS

JF - Journal of micro/nanolithography, MEMS, and MOEMS

SN - 1932-5150

IS - 2

M1 - 023503

ER -