In-chip direct laser writing of a centimeter-scale acoustic micromixer

Jan Joannes Frederik van 't Oever, N.K. Spannenburg, Herman L. Offerhaus, Henricus T.M. van den Ende, Jennifer Lynn Herek, Friedrich Gunther Mugele

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A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20  μm×20  μm×155  μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30  μm s −1 . The fabrication method allows for large flexibility and more complex designs
Original languageEnglish
Article number023503
Pages (from-to)023503-
JournalJournal of micro/nanolithography, MEMS, and MOEMS
Issue number2
Publication statusPublished - 21 Apr 2015


  • METIS-310616
  • IR-96688


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