In-chip direct laser writing of a centimeter-scale acoustic micromixer

Jorick van 't Oever; Niels Spannenburg; Herman L. Offerhaus; Dirk van den Ende; Jennifer L. Herek; Frieder Mugele

doi:10.1117/1.JMM.14.2.023503

In-chip direct laser writing of a centimeter-scale acoustic micromixer

Jorick van 't Oever
, Niels Spannenburg
, Herman L. Offerhaus
, Dirk van den Ende
, Jennifer L. Herek
, Frieder Mugele

Research output: Contribution to journal › Article › Academic › peer-review

13 Citations (Scopus)

171 Downloads (Pure)

Abstract

A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20 μm×20 μm×155 μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30 μm s −1 . The fabrication method allows for large flexibility and more complex designs

Original language	English
Article number	023503
Journal	Journal of micro/nanolithography, MEMS, and MOEMS
Volume	14
Issue number	2
DOIs	https://doi.org/10.1117/1.JMM.14.2.023503
Publication status	Published - 21 Apr 2015

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This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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10.1117/1.JMM.14.2.023503Licence: CC BY

ArticleFinal published version, 2.75 MBLicence: CC BY

Cite this

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abstract = "A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20 μm×20 μm×155 μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30 μm s −1 . The fabrication method allows for large flexibility and more complex designs",

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AU - Offerhaus, Herman L.

AU - van den Ende, Dirk

AU - Herek, Jennifer L.

AU - Mugele, Frieder

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In-chip direct laser writing of a centimeter-scale acoustic micromixer

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