In-plane oriented fluid control components, fabricated with new etching techniques

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 6th International conference on New Actuators with accompanying Exhibition (Actuator 98)
    Place of PublicationBremen, Germany
    Pages43-46
    Publication statusPublished - 17 Jun 1998
    Event6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998 - Bremen, Germany
    Duration: 17 Jun 199819 Jun 1998
    Conference number: 8

    Conference

    Conference6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998
    Abbreviated titleACTUATOR
    CountryGermany
    CityBremen
    Period17/06/9819/06/98

    Keywords

    • METIS-112695
    • IR-15813

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