In-plane oriented fluid control components, fabricated with new etching techniques

R.E. Oosterbroek; Johan W. Berenschot; Stefan Schlautmann; Theodorus S.J. Lammerink; Albert van den Berg; Michael Curt Elwenspoek

In-plane oriented fluid control components, fabricated with new etching techniques

R.E. Oosterbroek, Johan W. Berenschot, Stefan Schlautmann, Theodorus S.J. Lammerink, Albert van den Berg, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 6th International conference on New Actuators with accompanying Exhibition (Actuator 98)
Place of Publication	Bremen, Germany
Pages	43-46
Publication status	Published - 17 Jun 1998
Event	6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998 - Bremen, Germany Duration: 17 Jun 1998 → 19 Jun 1998 Conference number: 8

Conference

Conference	6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998
Abbreviated title	ACTUATOR
Country/Territory	Germany
City	Bremen
Period	17/06/98 → 19/06/98

Keywords

METIS-112695
IR-15813

Cite this

@inproceedings{562ac5a549514e4993d33c5d2f042ed6,

title = "In-plane oriented fluid control components, fabricated with new etching techniques",

keywords = "METIS-112695, IR-15813",

author = "R.E. Oosterbroek and Berenschot, {Johan W.} and Stefan Schlautmann and Lammerink, {Theodorus S.J.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",

year = "1998",

month = jun,

day = "17",

language = "Undefined",

isbn = "3-93339-00-6",

pages = "43--46",

booktitle = "Proceedings of the 6th International conference on New Actuators with accompanying Exhibition (Actuator 98)",

note = "6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998 ; Conference date: 17-06-1998 Through 19-06-1998",

}

Oosterbroek, RE, Berenschot, JW , Schlautmann, S, Lammerink, TSJ, van den Berg, A & Elwenspoek, MC 1998, In-plane oriented fluid control components, fabricated with new etching techniques. in Proceedings of the 6th International conference on New Actuators with accompanying Exhibition (Actuator 98). Bremen, Germany, pp. 43-46, 6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998, Bremen, Bremen, Germany, 17/06/98.

In-plane oriented fluid control components, fabricated with new etching techniques. / Oosterbroek, R.E.; Berenschot, Johan W.; Schlautmann, Stefan et al.
Proceedings of the 6th International conference on New Actuators with accompanying Exhibition (Actuator 98). Bremen, Germany, 1998. p. 43-46.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - In-plane oriented fluid control components, fabricated with new etching techniques

AU - Oosterbroek, R.E.

AU - Berenschot, Johan W.

AU - Schlautmann, Stefan

AU - Lammerink, Theodorus S.J.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

N1 - Conference code: 8

PY - 1998/6/17

Y1 - 1998/6/17

KW - METIS-112695

KW - IR-15813

M3 - Conference contribution

SN - 3-93339-00-6

SP - 43

EP - 46

BT - Proceedings of the 6th International conference on New Actuators with accompanying Exhibition (Actuator 98)

CY - Bremen, Germany

T2 - 6th International Conference on New Actuators with Accompanying Exhibition, ACTUATOR 1998

Y2 - 17 June 1998 through 19 June 1998

ER -