In situ monitoring of mimickd carbon contamination of EUV optics by spectroscopic ellipsometry

Juequan Chen, Eric Louis, R. Harmsen, Christopher James Lee, Herbert Wormeester, W. van Schaik, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 19 Jan 2010
EventPhysics@FOM Veldhoven 2010 - NH Koningshof Veldhoven, Veldhoven, Netherlands
Duration: 19 Jan 201020 Jan 2010

Conference

ConferencePhysics@FOM Veldhoven 2010
CountryNetherlands
CityVeldhoven
Period19/01/1020/01/10
OtherJaarlijkse bijeenkomst van Stichting FOM over fysica in Nederland

Keywords

  • METIS-267916

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