In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators

M. Elwenspoek, S. Bouwstra, E.L. de Weerd, Th.J.A. Popma

    Research output: Contribution to conferencePosterOther research output

    7 Citations (Scopus)
    Original languageEnglish
    Publication statusPublished - 1 Oct 1990
    Event4th European Conference on Solid-State Transducers, Eurosensors 1990 - Karlsruhe, Germany
    Duration: 1 Oct 19903 Oct 1990
    Conference number: 4

    Conference

    Conference4th European Conference on Solid-State Transducers, Eurosensors 1990
    Abbreviated titleEurosensors
    CountryGermany
    CityKarlsruhe
    Period1/10/903/10/90

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