In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators

M. Elwenspoek, S. Bouwstra, E.L. de Weerd, Th.J.A. Popma

    Research output: Contribution to conferencePoster

    7 Citations (Scopus)
    Original languageEnglish
    Publication statusPublished - 1 Oct 1990
    Event4th European Conference on Solid-State Transducers, Eurosensors 1990 - Karlsruhe, Germany
    Duration: 1 Oct 19903 Oct 1990
    Conference number: 4

    Conference

    Conference4th European Conference on Solid-State Transducers, Eurosensors 1990
    Abbreviated titleEurosensors
    CountryGermany
    CityKarlsruhe
    Period1/10/903/10/90

    Cite this

    Elwenspoek, M., Bouwstra, S., de Weerd, E. L., & Popma, T. J. A. (1990). In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators. Poster session presented at 4th European Conference on Solid-State Transducers, Eurosensors 1990, Karlsruhe, Germany.