In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process

Radko Bankras, Jisk Holleman, Jurriaan Schmitz, Marko Sturm, Andrey Zinine, Herbert Wormeester, Bene Poelsema

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)
2 Downloads (Pure)

Fingerprint

Dive into the research topics of 'In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process'. Together they form a unique fingerprint.

Earth and Planetary Sciences

Engineering

Material Science

Chemical Engineering

Chemistry