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In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process
Radko Bankras, Jisk Holleman, Jurriaan Schmitz, Marko Sturm, Andrey Zinine, Herbert Wormeester, Bene Poelsema
Research output: Contribution to journal › Article › Academic › peer-review
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