In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process

Radko Bankras, Jisk Holleman, Jurriaan Schmitz, Marko Sturm, Andrey Zinine, Herbert Wormeester, Bene Poelsema

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

Fingerprint

Dive into the research topics of 'In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy