In-situ RHEED of atomic layer deposition

R.G. Bankras, J. Holleman, Jurriaan Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)
    Original languageUndefined
    Title of host publicationEuroCVD-15 conference proceedings
    Place of PublicationBochum, Germany
    Pages-
    Publication statusPublished - 5 Sep 2005
    EventEuroCVD-15 conference: EuroCVD-15 conference proceedings - Bochum, Germany
    Duration: 5 Sep 20059 Sep 2005

    Conference

    ConferenceEuroCVD-15 conference
    CityBochum, Germany
    Period5/09/059/09/05

    Keywords

    • METIS-226523

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