In-situ RHEED of atomic layer deposition

R.G. Bankras, J. Holleman, Jurriaan Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)
    Original languageUndefined
    Title of host publicationEuroCVD-15 conference proceedings
    Place of PublicationBochum, Germany
    Pages-
    Publication statusPublished - 5 Sep 2005

    Keywords

    • METIS-226523

    Cite this

    Bankras, R. G., Holleman, J., & Schmitz, J. (2005). In-situ RHEED of atomic layer deposition. In EuroCVD-15 conference proceedings (pp. -). Bochum, Germany.