In-situ RHEED of atomic layer deposition

R.G. Bankras, J. Holleman, Jurriaan Schmitz

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	EuroCVD-15 conference proceedings
Place of Publication	Bochum, Germany
Pages	-
Publication status	Published - 5 Sep 2005

Keywords

@inproceedings{371bb763326c46d694e4d1551f8108c4,

title = "In-situ RHEED of atomic layer deposition",

keywords = "METIS-226523",

author = "R.G. Bankras and J. Holleman and Jurriaan Schmitz",

year = "2005",

month = sep,

day = "5",

language = "Undefined",

isbn = "1-56677-427-6",

pages = "--",

booktitle = "EuroCVD-15 conference proceedings",

}