In-situ stress analytics at sub-nanoscale thin film growth

Johan Reinink

Research output: ThesisPhD Thesis - Research UT, graduation UT

77 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
  • van de Kruijs, Robbert W.E., Co-Supervisor
Award date27 Nov 2019
Place of PublicationEnschede
Publisher
Print ISBNs978-90-365-4902-8
DOIs
Publication statusPublished - 27 Nov 2019

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