In-situ stress analytics at sub-nanoscale thin film growth

Johan Reinink

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Bijkerk, Fred, Supervisor van de Kruijs, Robbert W.E., Co-Supervisor
Award date	27 Nov 2019
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	978-90-365-4902-8
DOIs	https://doi.org/10.3990/1.9789036549028
Publication status	Published - 27 Nov 2019

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@phdthesis{432cc9a025c646d4be8fcc0c84e932ca,

title = "In-situ stress analytics at sub-nanoscale thin film growth",

author = "Johan Reinink",

year = "2019",

month = nov,

day = "27",

doi = "10.3990/1.9789036549028",

language = "English",

isbn = "978-90-365-4902-8",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

school = "University of Twente",

}