In-situ study of ammonium bromide formation for optimizing boron nitride ALD from BBr3 and NH3

Arnoud Jonathan Onnink*, Ramazan Oguzhan Apaydin, Jurriaan Schmitz, Alexey Y. Kovalgin

*Corresponding author for this work

Research output: Contribution to conferenceAbstract

Original languageEnglish
Publication statusPublished - 2019
EventEuroCVD 22 Baltic ALD 16 |2019 - Luxembourg, Luxembourg
Duration: 24 Jun 201928 Jun 2019
http://www.eurocvd-balticald2019.lu/

Conference

ConferenceEuroCVD 22 Baltic ALD 16 |2019
Abbreviated titleEuroCVD 2019
CountryLuxembourg
CityLuxembourg
Period24/06/1928/06/19
Internet address

Cite this

Onnink, A. J., Apaydin, R. O., Schmitz, J., & Kovalgin, A. Y. (2019). In-situ study of ammonium bromide formation for optimizing boron nitride ALD from BBr3 and NH3. Abstract from EuroCVD 22 Baltic ALD 16 |2019, Luxembourg, Luxembourg.