Influence of electrode materials and surface roughness on the homogeneity of discharges in fluorine based excimer laser gas mixtures

D. Mathew, Hubertus M.J. Bastiaens, Klaus J. Boller, P.J.M. Peters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Abstract

The influence of electrode materials and surface roughness on the discharge homogeneity of F2 based excimer laser gas mixtures is investigated in a small x-ray preionised discharge chamber. The temporal and spatial evolution of the discharge is monitored by taking photographs of the discharge luminosity with an ICCD camera. It is found that for the same surface roughness, discharges with nickel coated aluminum electrodes are more homogeneous than the discharges using chromium or gold coated aluminum, massive copper, aluminum, brass and steel electrodes. Moreover, the surface roughness of copper electrodes does not have a large influence on the homogeneity of discharges in F2 doped excimer laser gas discharges.
Original languageEnglish
Title of host publicationXVI Internation Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
EditorsDieter Schuöcker
Place of PublicationBellingham, Washington, USA
PublisherSPIE
Pages63460Q-1-63460Q-9
ISBN (Print)9780819464309
DOIs
Publication statusPublished - 4 Sep 2007
EventXVI International Symposium on Gas FLow, Chemical Lasers, and High-Power Lasers, Gmunden, Austria: XVI Internation Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers - Bellingham, Washington, USA
Duration: 4 Sep 20068 Sep 2006

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume6346
ISSN (Print)0277-786X

Conference

ConferenceXVI International Symposium on Gas FLow, Chemical Lasers, and High-Power Lasers, Gmunden, Austria
CityBellingham, Washington, USA
Period4/09/068/09/06

Keywords

  • METIS-240167
  • IR-96127

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