Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

M. Hauptmann, S. Brems, E. Camerotto, A.G. Zijlstra, G. Doumen, T. Bearda, P.W. Mertens, W. Lauriks

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Citations (Scopus)

Abstract

Single-wafer cleaning based on megasonic nozzle systems can be used for removing nano-particles. An optimized cleaning process must deliver a high degree of cleaning uniformity with a minimal amount of structural damage. However, the cleaning liquid is confined to a sonicated liquid jet, which is ejected by the nozzle. As a result, a high degree of complexity is introduced to the cleaning process due to the strong interdependencies between acoustic, electric and hydrodynamic characteristics of such systems. In the present work, the influence of the gas content of the cleaning liquid on the performance of a 1 MHz nozzle system is investigated and related to the intrinsic properties of the water jet. Cleaning tests are performed and the cleaning results are correlated to the electrical responses of the driving transducer. The electrical response depends both on the gasification of the liquid and the occurrence of acoustic reflections. Furthermore, Schlieren- and Sonoluminescence-imaging of the cleaning system are performed. The imaging techniques can identify the impact of bubbles on the propagation of acoustic waves and the resonant excitation of cleaning cavitation throughout the liquid column.
Original languageUndefined
Title of host publicationUnknown
PublisherElsevier
Pages1512-1515
Number of pages4
ISBN (Print)0167-9317
DOIs
Publication statusPublished - 28 Sep 2010
Event35th International Conference on Micro- and Nano-Engineering, MNE 2009 - Ghent, Belgium
Duration: 28 Sep 20091 Oct 2009
Conference number: 35

Publication series

Name5-8
PublisherElsevier
Number5-8
Volume87
ISSN (Print)0167-9317
ISSN (Electronic)1873-5568

Conference

Conference35th International Conference on Micro- and Nano-Engineering, MNE 2009
Abbreviated titleMNE
CountryBelgium
CityGhent
Period28/09/091/10/09

Keywords

  • Nano-particles removal
  • IR-79907
  • Single-wafer cleaning
  • METIS-266332
  • Acoustic cavitation
  • Megasonic cleaning

Cite this

Hauptmann, M., Brems, S., Camerotto, E., Zijlstra, A. G., Doumen, G., Bearda, T., ... Lauriks, W. (2010). Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning. In Unknown (pp. 1512-1515). (5-8; Vol. 87, No. 5-8). Elsevier. https://doi.org/10.1016/j.mee.2009.11.061
Hauptmann, M. ; Brems, S. ; Camerotto, E. ; Zijlstra, A.G. ; Doumen, G. ; Bearda, T. ; Mertens, P.W. ; Lauriks, W. / Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning. Unknown. Elsevier, 2010. pp. 1512-1515 (5-8; 5-8).
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abstract = "Single-wafer cleaning based on megasonic nozzle systems can be used for removing nano-particles. An optimized cleaning process must deliver a high degree of cleaning uniformity with a minimal amount of structural damage. However, the cleaning liquid is confined to a sonicated liquid jet, which is ejected by the nozzle. As a result, a high degree of complexity is introduced to the cleaning process due to the strong interdependencies between acoustic, electric and hydrodynamic characteristics of such systems. In the present work, the influence of the gas content of the cleaning liquid on the performance of a 1 MHz nozzle system is investigated and related to the intrinsic properties of the water jet. Cleaning tests are performed and the cleaning results are correlated to the electrical responses of the driving transducer. The electrical response depends both on the gasification of the liquid and the occurrence of acoustic reflections. Furthermore, Schlieren- and Sonoluminescence-imaging of the cleaning system are performed. The imaging techniques can identify the impact of bubbles on the propagation of acoustic waves and the resonant excitation of cleaning cavitation throughout the liquid column.",
keywords = "Nano-particles removal, IR-79907, Single-wafer cleaning, METIS-266332, Acoustic cavitation, Megasonic cleaning",
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Hauptmann, M, Brems, S, Camerotto, E, Zijlstra, AG, Doumen, G, Bearda, T, Mertens, PW & Lauriks, W 2010, Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning. in Unknown. 5-8, no. 5-8, vol. 87, Elsevier, pp. 1512-1515, 35th International Conference on Micro- and Nano-Engineering, MNE 2009, Ghent, Belgium, 28/09/09. https://doi.org/10.1016/j.mee.2009.11.061

Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning. / Hauptmann, M.; Brems, S.; Camerotto, E.; Zijlstra, A.G.; Doumen, G.; Bearda, T.; Mertens, P.W.; Lauriks, W.

Unknown. Elsevier, 2010. p. 1512-1515 (5-8; Vol. 87, No. 5-8).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

AU - Hauptmann, M.

AU - Brems, S.

AU - Camerotto, E.

AU - Zijlstra, A.G.

AU - Doumen, G.

AU - Bearda, T.

AU - Mertens, P.W.

AU - Lauriks, W.

N1 - The 35th International Conference on Micro- and Nano-Engineering (MNE)

PY - 2010/9/28

Y1 - 2010/9/28

N2 - Single-wafer cleaning based on megasonic nozzle systems can be used for removing nano-particles. An optimized cleaning process must deliver a high degree of cleaning uniformity with a minimal amount of structural damage. However, the cleaning liquid is confined to a sonicated liquid jet, which is ejected by the nozzle. As a result, a high degree of complexity is introduced to the cleaning process due to the strong interdependencies between acoustic, electric and hydrodynamic characteristics of such systems. In the present work, the influence of the gas content of the cleaning liquid on the performance of a 1 MHz nozzle system is investigated and related to the intrinsic properties of the water jet. Cleaning tests are performed and the cleaning results are correlated to the electrical responses of the driving transducer. The electrical response depends both on the gasification of the liquid and the occurrence of acoustic reflections. Furthermore, Schlieren- and Sonoluminescence-imaging of the cleaning system are performed. The imaging techniques can identify the impact of bubbles on the propagation of acoustic waves and the resonant excitation of cleaning cavitation throughout the liquid column.

AB - Single-wafer cleaning based on megasonic nozzle systems can be used for removing nano-particles. An optimized cleaning process must deliver a high degree of cleaning uniformity with a minimal amount of structural damage. However, the cleaning liquid is confined to a sonicated liquid jet, which is ejected by the nozzle. As a result, a high degree of complexity is introduced to the cleaning process due to the strong interdependencies between acoustic, electric and hydrodynamic characteristics of such systems. In the present work, the influence of the gas content of the cleaning liquid on the performance of a 1 MHz nozzle system is investigated and related to the intrinsic properties of the water jet. Cleaning tests are performed and the cleaning results are correlated to the electrical responses of the driving transducer. The electrical response depends both on the gasification of the liquid and the occurrence of acoustic reflections. Furthermore, Schlieren- and Sonoluminescence-imaging of the cleaning system are performed. The imaging techniques can identify the impact of bubbles on the propagation of acoustic waves and the resonant excitation of cleaning cavitation throughout the liquid column.

KW - Nano-particles removal

KW - IR-79907

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KW - METIS-266332

KW - Acoustic cavitation

KW - Megasonic cleaning

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DO - 10.1016/j.mee.2009.11.061

M3 - Conference contribution

SN - 0167-9317

T3 - 5-8

SP - 1512

EP - 1515

BT - Unknown

PB - Elsevier

ER -

Hauptmann M, Brems S, Camerotto E, Zijlstra AG, Doumen G, Bearda T et al. Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning. In Unknown. Elsevier. 2010. p. 1512-1515. (5-8; 5-8). https://doi.org/10.1016/j.mee.2009.11.061