Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

M. Hauptmann, S. Brems, Elisabeth Camerotto, A. Zijlstra, G. Doumen, T. Bearda, P.W. Mertens, W. Lauriks

Research output: Contribution to journalConference articleAcademicpeer-review

12 Citations (Scopus)
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