Abstract
The nanotribological properties of nanostructured thin films of tetragonal ZrO2 on oxidized Si (100) were studied as a function of grain size and relative humidity (RH) by atomic force microscopy. The nanostructured ZrO2 showed a 50% decrease in friction coefficient μ compared with oxidized Si (100) in dry nitrogen atmosphere and 40% RH. A maximum of μ was observed at ca. 40% RH for both samples, while there were insignificant differences in μ for ZrO2 samples with grain sizes between 12 and 30 nm. The good tribological properties open the possibility for nanostructured zirconia to be applied as wear-resistant, low friction coatings on various materials.
Original language | Undefined |
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Pages (from-to) | 2498-2503 |
Number of pages | 6 |
Journal | Journal of the American Ceramic Society |
Volume | 88 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2005 |
Keywords
- IR-72011
- METIS-228990